Journal of Materials Science

, Volume 14, Issue 7, pp 1624–1630 | Cite as

The synthesis of ultrafine titanium nitride in an r.f. plasma

  • Toyonobu Yoshida
  • Akihisa Kawasaki
  • Kunihiko Nakagawa
  • Kazuo Akashi


The ultrafine titanium nitride particles with a statistical median size of about 10 nm were prepared by passing pure titanium powder (<25 μm) through a radio-frequency (r.f.) argon-nitrogen plasma. The effects of the [N2]/[Ti] molar ratio of the reactant on the nature of the products were investigated by chemical analysis, X-ray diffraction and electron microscopy. The conversion efficiency was close to 100%. The colour of the product was black, which is attributed to the particle size ranging from 5 to 150 nm. Most of the crystallites were single crystal and showed clear-cut habits of cubic phase. The chemical composition and lattice parameter of the products changed with the [N2]/[Ti] ratio. The thermodynamics of the process were also considered. These results provide evidence to suggest that new materials can be produced by an r.f. plasma process, in particular, the ultrafine refractory nitrides.


Colour Polymer Particle Size Microscopy Electron Microscopy 
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Copyright information

© Chapman and Hall Ltd 1979

Authors and Affiliations

  • Toyonobu Yoshida
    • 1
  • Akihisa Kawasaki
    • 1
  • Kunihiko Nakagawa
    • 1
  • Kazuo Akashi
    • 1
  1. 1.Department of Metallurgy and Materials Science, Faculty of EngineeringThe University of TokyoTokyoJapan

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