Optical emission spectroscopy and actinometry in CCl4-Cl2 radiofrequency discharges
- 142 Downloads
Radiofrequency discharges fed with CCl4-Cl2 mixtures have been studied in the pressure range 0.3 to 0.6 torr by means of emission spectroscopic actinometry with Ar, He, and N2 as actinometers. Two different reactors, a parallel plate and a capacitively coupled tubular one, have been utilized for this study to obtain information for a large range of electron energy distributions. Analysis of the experimental results demonstrates the following: the utilization of actinometry and its range of validity, the importance of electron attachment to CClx species during the plasma decomposition process, and the effects of the presence of chlorine and “glowpolymer” in the discharge medium.
Key wordsLow pressure rf discharges optical emission spectroscopy actinometry
Unable to display preview. Download preview PDF.
- 4.V. V. Gusev, V. M. Dolgopov, D. I. Slovetskii, and E. F. Shelykhmanov,High Temp. 21, 15 (1983).Google Scholar
- 5.D. L. Flamm and V. M. Donnelly,Plasma Chem. Plasma Process. 1, (1981), and references therein.Google Scholar
- 7.H. J. Tiller, R. Göbel, F. W. Breitbarth, and D. Sameith,Proceedings of the 6th International IUPAC Symposium on Plasma Chemistry, M. J. Boulos and R. J. Munz, eds., Vol. 3, p. 577, Montreal, 1983.Google Scholar
- 8.G. Smolinsky, R. P. Chang, and T. M. Mayer,J. Vac. Sci. Technol. 18, (1981); Y. Horiike, T. Yamazaki, M. Shibagaki, and T. Kurisaki,Jpn. J. Appl. Phys. 21, 1412 (1982); R. H. Bruce inPlasma Processing, R. G. Frieser and C. J. Mogab, eds., The Electrochemical Soc., Pennington (1981), p. 243; P. M. Schaible, W. C. Metzger, and J. P. Anderson,J. Vac. Sci. Technol. 15, 334 (1978); B. J. Curtis and H. J. Brunner,J. Electrochem. Soc. 125, 829 (1978); B. J. Curtis,Solid State Technol. 24, 129 (1980); G. C. Schwartz and P. M. Schaible,Solid State Technol. 23, 85 (1980).Google Scholar
- 13.H. U. Scheunemann, E. Illenberger, and H. Baumgärtel,Ber. Bunsenges. Phys. Chem. 84, 580 (1980); J. P. Johnson, L. G. Christophorou, and J. G. Carter,J. Chem. Phys. 67, 2196 (1977); H. S. W. Massey, E. H. S. Burhop, and H. B. Gilbody,Electronic and Ionic Impact Phenomena, Vol. 2, Oxford University Press (1969).Google Scholar