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Modeling of the impurity distribution obtained by ion implantation

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Abstract

Models and a suite of programs (TRION, PIRSON, CHAPS, and DYCOD) that make it possible to calculate the impurity distribution for any implantation dose in a target with arbitrary composition are described. Test calculations for each program showed that the results are in good agreement with experimental data and with theoretical calculations performed by other authors. The suite of programs is intended for the development of the physical principals of ion-beam technologies.

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References

  1. 1.

    H. Russel and I. Ruge, Ion Implantation [Russian translation], Nauka, Moscow (1983).

  2. 2.

    J. M. Pote (ed.), Modification and Doping of Surfaces by Laser, Ion, and Electron Beams [Russian translation], Mashinostroenie, Moscow (1987).

  3. 3.

    P. Chou and N. M. Ghoniem, J. Nuc. Mater.,117, 55–63 (1983).

  4. 4.

    F.-Z. Cui and H.-D. Li, J. Nucl. Mater.,133, 353–356 (1985).

  5. 5.

    G. Vezkelethy, Kozp. Fir. Kut. Inter., No. 107 (1985).

  6. 6.

    A. I. Mel'ker and S. N. Romanov, Zh. Tekh. Fiz.,52, No. 7, 1362–1368 (1982).

  7. 7.

    Y. Miyagawa and S. Miyagawa, Jpn. J. Appl. Phys.,54, No. 12, 7124–7131 (1983).

  8. 8.

    I. Adesida and L. Karapiperis, Rad. Eff.,61, 223–233 (1982).

  9. 9.

    J. P. Biersack and L. G. Haggmark, Nucl. Instrum. Methods,174, 257–269 (1980).

  10. 10.

    T. S. Pugacheva, O. V. Gusev, and T. L. Roslyakova, Fiz. Khim. Obrab. Material., No. 5, 22–31 (1982).

  11. 11.

    W. Eckstein, H. Verbeek, and J. P. Biersack, J. Appl. Phys.,51, No. 2, 1194–1200 (1980).

  12. 12.

    F. Schulz and K. Wittmaack, Rad. Eff.,29, 31–40 (1976).

  13. 13.

    H. Krautle, Nucl. Instrum. Methods,134, 167–172 (1976).

  14. 14.

    D. Farkas, I. L. Singer, and M. Rangaswamy, Mat. Res. Soc. Symp. Proc.,27, 609–614 (1984).

  15. 15.

    W. Moller and W. Eckstein, Nucl. Instrum. Methods B,2, 814–818 (1984).

  16. 16.

    P. S. Chou and N. M. Ghoniem, J. Nucl. Mater.,141, 216–220 (1986).

  17. 17.

    O. F. Goktepe, T. D. Andreadis, M. Rosen, G. P. Mueller, and M. L. Roush, Nucl. Instrum. Methods B,13, 434–438 (1986).

  18. 18.

    V. G. Abdrashitov and V. V. Ryzhov, Preprint No. 47, Tomsk Scientific Center, Siberian Branch of the Russian Academy of Sciences, Tomsk (1990).

  19. 19.

    A. F. Burenkov, F. F. Komarov, M. A. Kumakhov, and M. M. Temkin, Spatial Distributions of the Energy Released in Atomic Collision Cascadess in Solids [in Russian], Energoatomizdat, Moscow (1985).

  20. 20.

    V. G. Abdrashitov and V. V. Ryzhov, Preprint No. 30, Tomsk Sicnetific Center, Siberian Branch of the Russian Academy of Sciences, Tomsk (1991).

  21. 21.

    V. G. Abdrashitov and V. V. Ryzhov, Preprint No. 14, Tomsk Scientific Center, Siberian Branch of the Russian Academy of Sciences, Tomsk (1992).

  22. 22.

    R. Oven, M. D. J. Bowyer, and D. G. Ashworth, J. Phys.: Condens. Matter,5, 2157–2170 (1993).

  23. 23.

    V. S. Korolyuk, N. I. Portenko, A. V. Skorokhod, and A. F. Turbin, Handbook of the Theory of Probability and Mathematical Statistics [in Russian], Nauka, Moscow (1985).

  24. 24.

    A. G. Kurganov and G. L. Fal'ko, Poverkhn. Fiz., Khim., Mekhan., No. 1, 127–130 (1990).

  25. 25.

    V. S. Eremeev, Diffusion and Stress [in Russian], Énergoatomizdat, Moscow (1984).

  26. 26.

    U. Littmark and W. O. Hofer, Nucl. Instrum. Methods,168, 329–342 (1980).

  27. 27.

    M. G. Stepanova, Author's Abstract of Candidate's Dissertation in Physical and Mathematical Sciences (1992).

  28. 28.

    A. Yu. Zakharov and E. I. Pipka, Fiz. Tverd. Tela,23, No. 10, 3159–3163 (1981).

  29. 29.

    V. V. Titov, Zh. Tekh. Fiz.,49, No. 4, 844–849 (1979).

  30. 30.

    G. Betz, “Alloy sputtering,” Surf. Sci.,92, 283–309 (1980).

  31. 31.

    P. Sigmund and A. Grass-Marti, Nucl. Instrum. Methods,182–183, 25–41 (1981).

  32. 32.

    W. L. Johnson, Y. T. Cheng, M. Rossum, and M.-A. Nicolet, Nucl. Instrum. Methods B,7/8, 25–41 (1981).

  33. 33.

    Z. A. Iskranderova, T. D. Radjabov, R. Yu. Leiderman, et al., Nucl. Instrum. Methods B,14, 542–554 (1986).

  34. 34.

    L. Pranyavischus and Yu. Dudonis, Modification of the Properties of Solids by Ion Beams [in Russian], Mokslas, Vil'nyus (1980).

  35. 35.

    V. V. Titov, Preprint No. 3774/11, Institute of Atomic Energy, Moscow (1983).

  36. 36.

    W. K. Hofker, D. P. Oesthoek, N. J. Koeman, and H. A. de Grefte, Rad. Eff.,24, No. 3/4, 223–231 (1975).

  37. 37.

    H. Hyssel, G. Prinke, K. Haberger, K. Hoffmann, K. Muller, and R. Henkelmann, Appl. Phys.,24, 39–43 (1981).

  38. 38.

    M. Simard-Normandin and C. Slaby, J. Electrochem. Soc., 2218–2223 (1985).

  39. 39.

    W. Wach and K. Wittmaack, Nucl. Instrum. Methods,194, 113–116 (1982).

  40. 40.

    J. Cervena, V. Hnatowicz, J. Hoffmann, Z. Kosina, J. Kvitek, and P. Onheiser, Nucl. Instrum. Methods,188, 185 (1981).

  41. 41.

    J. F. Ziegler and B. L. Crowder, Appl. Phys. Lett.,21, 16–17 (1972).

  42. 42.

    P. C. Zalm, G. M. Fontijn, K. T. F. Janssen, and C. J. Vriezema, Nucl. Instrum. Methods B,42, 397–400 (1989).

  43. 43.

    W. Brandt and M. Kitagawa, Phys. Rev. B,25, No. 9, 5631 (1982).

  44. 44.

    J. F. Ziegler, J. P. Biersack, and U. Littmark in: Proceedings of the International Ion Engineering Congress, Kyoto (1983), pp. 1861–1873.

  45. 45.

    X. Xiangang, X. Yueyuan, and T. Chunyu, Nucl. Instrum. Methods B,51, 11–16 (1990).

  46. 46.

    M. J. Norgett, M. T. Robinson, and I. M. Torrens, Nucl. Eng. Design,33, 50 (1975).

  47. 47.

    A. F. Burenkov, F. F. Komarov, and M. M. Temkin, Rad. Eff.,69, No. 3/4, 165–177 (1983).

  48. 48.

    R. Berish, Sputtering of Solids Under Ion Bombardment: Physics of Sputtering of One-Element Solids [Russian translation], Mir, Moscow (1984).

  49. 49.

    P. Sigmund, Phys. Rev.,184, No. 2, 383–416 (1969).

  50. 50.

    Y. Yamamura in: Proceedings of the International Ion Engineering Congress, Kyoto (1983), pp. 1875–1886.

  51. 51.

    M. Rangaswamy and D. Farkas, Proc. Mat. Res. Soc. Symp.,45, 91–96 (1985).

  52. 52.

    H. H. Anderson, Appl. Phys.,18, 131–140 (1979).

  53. 53.

    F. V. Nolfi, Phase Transformations Under Irradiation [Russian translation], Metallurgiya, Chelyabinsk (1989).

  54. 54.

    M. A. Kumakhov and F. F. Komarov, Energy Losses and Ion Ranges in Solids [in Russian], Izd. Belorus. Gos. Univer., Minsk (1979).

  55. 55.

    A. R. Miedema, Phillips Tech. Rev.,36, No. 8, 217–231 (1976).

  56. 56.

    S. H. Han, G. L. Kulcinski, and J. R. Conrad, Nucl. Instrum. Methods B,45, 701–706 (1990).

  57. 57.

    O. F. Goktepe, Nucl. Instrum. Methods B,59/60, 28–32 (1991).

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Translated from Izvstiya Vysshykh Uchebnykh Zavedenii, Fizika, No. 5, pp. 8–22, May, 1994.

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Abdrashitov, V.G., Ryzhov, V.V. Modeling of the impurity distribution obtained by ion implantation. Russ Phys J 37, 410–422 (1994). https://doi.org/10.1007/BF00560112

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Keywords

  • Experimental Data
  • Theoretical Calculation
  • Test Calculation
  • TRION
  • Impurity Distribution