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Transverse transmission electron microscopy of sputtered NbN films

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A technique of preparing transverse sections of sputtered NbN films for transmission electron microscopy is presented. Microstructural details of grain morphologies, orientations, and phase compositions can be readily analysed using transverse specimens over the entire film thickness including the deposited film-substrate interface.

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Ho, H.L., Gray, K.E., Kampwirth, R.T. et al. Transverse transmission electron microscopy of sputtered NbN films. J Mater Sci 21, 4097–4100 (1986). https://doi.org/10.1007/BF00553474

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  • Polymer
  • Microscopy
  • Electron Microscopy
  • Transmission Electron Microscopy
  • Film Thickness