A study on titanium diffusion into LiNbO3 waveguides by electron probe analysis and X-ray diffraction methods
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Abstract
The diffusion of titanium into lithium niobate has been studied by X-ray rocking curve and topographic methods as well as electron probe microanalysis in an attempt to determine the diffusion mechanism and evaluate the crystallinity of the diffused layer. It was found that the titanium concentration along the depth in the diffused layer approximates to a Gaussian distribution, the activation energy for diffusion being 2.18 eV. We also found that the diffusion of titanium caused a marked lattice contraction along the a-axis (Δa/a ≈ −10−3) resulting in the generation of misfit dislocations and cracks in the diffused layer. The high activation energy and the lattice contraction suggest that the titanium ions diffuse substitutionally into the lithium niobate crystal. Mechanisms causing refractive index changes in the diffused layer are also discussed.
Keywords
Titanium Activation Energy Diffuse Layer Electron Probe LiNbO3Preview
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