Journal of Materials Science

, Volume 28, Issue 18, pp 5073–5078 | Cite as

Vanadium dioxide thin films prepared by chemical vapour deposition from vanadium(III) acetylacetonate

  • T. Maruyama
  • Y. Ikuta


Vanadium dioxide thin films were prepared by an atmospheric-pressure chemical vapour deposition method. The raw material was vanadium(III) acetylacetonate. Polycrystalline thin films were obtained at a reaction temperature of 500°C. Slow post-deposition cooling of the deposits on a substrate of fused quartz or sapphire single crystal yields vanadium dioxide films which are not mixed with other phases, i.e. V3O7 or V4O9. Optical and electrical switching behaviours strongly depend on film thickness. At a film thickness of about 300 nm the transition temperature showed a minimum value of 44 °C.


Vanadium Sapphire Chemical Vapour Deposition Acetylacetonate Switching Behaviour 
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Copyright information

© Chapman & Hall 1993

Authors and Affiliations

  • T. Maruyama
    • 1
  • Y. Ikuta
    • 1
  1. 1.Department of Chemical Engineering, Faculty of EngineeringKyoto UniversityKyotoJapan

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