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Applied Physics A

, Volume 50, Issue 2, pp 233–235 | Cite as

Laser photolytic deposition of molybdenum and tungsten thin film microstructures

  • W. Radloff
  • E. Below
  • H. Dürr
  • V. Stert
Surfaces And Multilayers

Abstract

We have deposited thin metal films of Mo and W with sub-μm lateral resolution using the photodissociation of the carbonyls by the frequency doubled radiation of an Arion laser at cw and ps-pulse operation, respectively. In both regimes similar curves are obtained for the intensity dependence of the deposition rate. No difference was observed for the lateral resolution using cw or ps-pulse irradiation. Measurements of the deposition rate as a function of the spot size indicate that the decomposition occurs in the adsorbed phase.

PACS

81.15 82.50 

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Copyright information

© Springer-Verlag 1990

Authors and Affiliations

  • W. Radloff
    • 1
  • E. Below
    • 1
  • H. Dürr
    • 1
  • V. Stert
    • 1
  1. 1.Central Institute of Optics and SpectroscopyAcademy of Sciences of the GDRBerlin-AdlershofGerman Democratic Republic

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