Applied Physics A

, Volume 54, Issue 6, pp 533–537 | Cite as

Optical and structural properties of thin films deposited from laser fused Zirconia, Hafnia, and Yttria

  • M. Swarnalatha
  • A. F. Stewart
  • A. H. Guenther
  • C. K. Carniglia
Surfaces And Multilayers
Received:
Accepted:

Abstract

The optical and structural properties of films deposited from laser sintered Zirconia (ZrO2), Hafnia (HfO2), and Yttria (Y2O3) and from the commercially available (unprocessed material) Zirconia, Hafnia and Yttria, were studied and compared. All the films had low absorption. Films deposited from the laser sintered material had very low optical inhomogeneity. ZrO2 films showed negative inhomogeneity for films deposited from the unprocessed material. The refractive index increased for ZrO2 films deposited from the laser sintered material. HfO2 and Y2O3 films showed positive inhomogeneity when deposited from the unprocessed material. The refractive index of the films of these materials decreased when deposited from the laser sintered material. The thin films of ZrO2 and Y2O3 prepared from laser sintered material had stable monoclinic and cubic structures respectively while HfO2 films were found to be amorphous.

PACS

78.65 68.55 81.40 
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Copyright information

© Springer-Verlag 1992

Authors and Affiliations

  • M. Swarnalatha
    • 1
  • A. F. Stewart
    • 2
  • A. H. Guenther
    • 3
  • C. K. Carniglia
    • 4
  1. 1.Indian Institute of ScienceInstrumentation and Services UnitBangaloreIndia
  2. 2.Litton Guidance and Missile SystemsWoodland HillsUSA
  3. 3.Los Alamos National LaboratoryLos AlamosUSA
  4. 4.S. Systems CorporationAlbuquerqueUSA

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