Skip to main content
Log in

Interaction of Pd-overlayers with SnO2: comparative XPS, SIMS, and SNMS studies

  • Part I
  • Secondary Neutral Mass Spectrometry And Laser Photoionization
  • Published:
Fresenius' Journal of Analytical Chemistry Aims and scope Submit manuscript

Summary

We report about interaction processes between palladium (Pd) and tin dioxide (SnO2) studied with various surface spectroscopic techniques. Total sputter yields necessary for absolute depth calibration in SIMS are determined for SnO2. Clustering of palladium occurs at low temperatures. Small changes in the XPS relative core level intensities of Pd and Sn allow to determine cluster sizes. Oxidation of Pd in the presence of oxygen at T≥470 K is a prerequisite for diffusion of Pd2+ ions into SnO2 layers. The latter process is confirmed and described quantitatively by evaluating the SIMS and SNMS measurements.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Chopra KL (1983) Thin Solid Films 102:1–46

    Google Scholar 

  2. Göpel W (1989) Sensors and Actuators 16:187–193

    Google Scholar 

  3. Matsushima S, Teraoka Y, Miura N, Yamazoe N (1988) Jpn J Appl Phys 27:1798–1802

    Google Scholar 

  4. Geiger JF, Schierbaum KD, Göpel W (1990) Vacuum 41:1629–1633

    Google Scholar 

  5. Göpel W, Schmeisser D, Wiemhöfer HD (1987) Proc ECASIA '87, Stuttgart, FRG

  6. Weitzel T (1989) Diploma Thesis, Tübingen

  7. Müller KH, Seifert K, Wilmers H (1985) J Vac Sci Tech A 3:1367–1370

    Google Scholar 

  8. Oechsner H (1988) Nucl Inst Meth Phys Res B 33:918–925

    Google Scholar 

  9. Benninghoven A, Rüdenauer FG, Werner HW (1987) Secondary ion mass spectrometry. Wiley, New York, p 213

    Google Scholar 

  10. Schierbaum KD, Wiemhöfer HD, Göpel W (1988) Solid State Ionics 28–30:1631–1636

    Google Scholar 

  11. Yamazoe N (1989) (private communication)

  12. Barin I, Knacke O (1989) Thermodynamical properties of inorganic substances, 2nd edn. Springer, Berlin Heidelberg New York, p 697

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Geiger, J.F., Beckmann, P., Schierbaum, K.D. et al. Interaction of Pd-overlayers with SnO2: comparative XPS, SIMS, and SNMS studies. Fresenius J Anal Chem 341, 25–30 (1991). https://doi.org/10.1007/BF00322101

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00322101

Keywords

Navigation