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TiC/a-C Nano-Composite Films Fabricated by Using Closed-Field Unbalanced Magnetron Sputtering for Biomedical Applications

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Abstract

Hydrogenated amorphous carbon films (a-C:H or DLC) exhibit high hardness, low friction coefficient, and high wear resistance. Variations in the tribological properties were studied for amorphous carbon films fabricated by using closed-field unbalanced magnetron sputtering with TiC thin films as an adhesive layer. The a-C, a-C:Ti, and TiC/a-C nano-composite films were prepared using closed-field unbalanced magnetron sputtering with graphite and titanium as targets. Various structures of Ti-doped a-C and TiC interlayers under the amorphous carbon (a-C) film were examined to improve the tribological properties, and characteristic changes in the nano-composite structure were observed. The structure of the nano-composite film showed improved tribological properties, including high hardness, low friction coefficient, low surface roughness, and good adhesion of the a-C thin films. With a Ti-doped a-C film in a laminated structure, the tribological properties were improved to a high hardness value of >28.5 GPa, a high elastic modulus of >250 GPa, and a smooth surface with a roughness of <0.1 nm.

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Acknowledgments

This study was supported by research funds from Chosun University, 2015.

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Authors and Affiliations

  1. Department of Electronics, Chosun College of Science and Technology, Gwangju, 61453, Korea

    Yong Seob Park

  2. Department of Electrical Engineering, Chosun University, Gwangju, 61452, Korea

    Nam-Hoon Kim

Authors
  1. Yong Seob Park
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  2. Nam-Hoon Kim
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Correspondence to Nam-Hoon Kim.

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Park, Y.S., Kim, NH. TiC/a-C Nano-Composite Films Fabricated by Using Closed-Field Unbalanced Magnetron Sputtering for Biomedical Applications. J. Korean Phys. Soc. 75, 380–384 (2019). https://doi.org/10.3938/jkps.75.380

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  • DOI: https://doi.org/10.3938/jkps.75.380

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