Abstract
Titanium metal layers of different thicknesses were deposited on optical glass, quartz and ceramic at 50 °C and 150 °C substrate temperatures with the help of magnetron deposition. The metal layers were converted into a rutile phase of TiO2 at different annealing temperatures. The effect of thermal annealing on the morphology and the refractive index of the thin film was investigated. The film’s quality and roughness were found to depend on the substrate’s temperature during metal film deposition and on the annealing temperature. The TiO2 thin films obtained on ceramic and glass substrates were seem to show less surface roughness at low substrate temperature as compared to the quartz substrate.
Similar content being viewed by others
References
R. Mechiakh, F. Meriche, R. Kremer, R. Bensaha, B. Boudine and A. Boudriousa, Opt. Mater. 30, 645 (2007).
J. T. Choy, J. D. B. Bradley, P. B. Deotare, I. B. Burgess, C. C. Evans, E. Mazur and M. Loncar, Opt. Lett. 37, 539 (2010).
Z. F. Bi, L. Wang, X. H. Liu, S. M. Zhang, M. M. Dong, Q. Z. Zhao, X. L. Wu and K. M. Wang, Opt. Express 20, 6712 (2012).
J. M. Bennett, E. Pelletier, G. Albrand, J. P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther and A. Saxer, Appl. Opt. 28, 3303 (1989).
N. Sherwood-Droz and M. Lipson, Opt. Express 19, 17758 (2011).
M. U. Snhail, G. M. Rao and S. Mohan, J. Appl. Phys. 71, 1421 (1992).
K. Okimura, N. Maeda and A. Shibata, Thin Solid Films 281-282, 427 (1996).
D. G. Howitt and A. B. Harker, J. Mater. Sci. 2, 201 (1987).
M. D. Stamate, Appl. Sur. Sci. 218, 317 (2003).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Butt, M.A., Fomchenkov, S.A. Thermal effect on the optical and morphological properties of TiO2 thin films obtained by annealing a Ti metal layer. Journal of the Korean Physical Society 70, 169–172 (2017). https://doi.org/10.3938/jkps.70.169
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.3938/jkps.70.169