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Gigahertz MEMS Clock Generator

  • Physical and Engineering Fundamentals of Microelectronics and Optoelectronics
  • Published:
Optoelectronics, Instrumentation and Data Processing Aims and scope

Abstract

An intensely developing aspect of advanced microelectronics is microelectromechanical systems (MEMS). The present paper describes various issues associated with the development of a new MEMS clock generator capable of operating at gigahertz frequencies. The main features of generating and supporting forced oscillations of the moving electrode under the action of electrostatic forces are analyzed. A possibility of supporting such oscillations under conditions of high inertial g-loads (up to 106g and more) is demonstrated. A mathematical model of a micro-oscillator is developed, and the basic regimes of its operation are described.

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Authors and Affiliations

  1. Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090, Russia

    E. G. Kostsov & A. A. Sokolov

Authors
  1. E. G. Kostsov
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  2. A. A. Sokolov
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Corresponding author

Correspondence to E. G. Kostsov.

Additional information

Russian Text © The Author(s), 2019, published in Avtometriya, 2019, Vol. 55, No. 2, pp. 61–69.

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Kostsov, E.G., Sokolov, A.A. Gigahertz MEMS Clock Generator. Optoelectron.Instrument.Proc. 55, 154–161 (2019). https://doi.org/10.3103/S8756699019020079

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  • DOI: https://doi.org/10.3103/S8756699019020079

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