Skip to main content
SpringerLink
Log in

A Diamond Diffraction Grating Formed via Ion Implantation

  • Proceedings of the XII International Scientific School-Seminar “Fundamental Research and Innovation: Nanooptics, Photonics, and Coherent Spectroscopy”
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A fundamentally new way of fabricating a diffraction grating on a surface of diamond via ion (boron) implantation through a superimposed mask is proposed. It is found that graphitization occurs during ion irradiation in unmasked areas in the near-surface region. This graphitization results in the swelling of the surface layer and the formation of a phase periodic structure.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Soifer, V.A., Metod komp’yuternoi optiki (Computer Optics Method), Moscow: Fizmatlit, 2003.

    Google Scholar 

  2. Ratkin, L., Fotonika, 2011, vol. 4, p.18.

    Google Scholar 

  3. Kononeko, V.V., Konov, V.I., Pimenov, S.M., et al., Quantum Electron., 1999, vol. 29, p.9.

    Article  ADS  Google Scholar 

  4. Karlsson, M. and Nikolajeff, F., Opt. Express, 2003, vol. 11, p.502.

    Article  ADS  Google Scholar 

  5. Tukmakov, K.N., Volodin, B.O., Pavel’ev, V.S., et al., Vestn. Samar. Aerokosm. Gos. Univ., 2012, no. 7, p.112.

    Google Scholar 

  6. Shvydko, Y., Stopin, S., Blank, V., and Terentev, S., Nat. Photonics, 2011, vol. 5, p.539.

    Article  ADS  Google Scholar 

  7. Evlyukhin, A.B., Bozhevolnyi, S.I., Stepanov, A.L., and Krenn, J.R., Appl. Phys. B, 2006, vol. 84, p.29.

    Article  ADS  Google Scholar 

  8. Ashurov, M.S., Kazakova, T.A., Stepanov, A.L., and Klimonsky, S.O., Appl. Phys. A, 2016, vol. 122, p. 1054.

    Article  ADS  Google Scholar 

  9. Verevkin, Yu.K., Bronnikova, N.G., Korolikhin, V.V., Gushchina, Yu.Yu., Petryakov, V.N., Filatov, D.O., Bityurin, N.M., Kruglov, A.V., and Levichev, V.V., Tech. Phys., 2003, vol. 48, p.757.

    Article  Google Scholar 

  10. Volkov, A.V., Kazanskii, N.L., Moiseev, O.Yu., and Soifer, V.A., RF Patent 2197006, 2003.

  11. Stepanov, A.L., Galyautdinov, M.F., Evlyukhin, A.B., et al., Appl. Phys. A, 2013, vol. 111, p.261.

    Article  ADS  Google Scholar 

  12. Stepanov, A.L., Nuzhdin, V.I., Valeev, V.F., et al., RF Patent 2541495, 2015.

  13. Stepanov, A.L., Fotonnye sredy s nanochastitsami, sintezirovannymi ionnoi implantatsiei (Photonic Media with Nanoparticles Synthesized by Ion Implantation), Saarbrücken: Lambert Academic, 2014.

    Google Scholar 

  14. Van Beveren, L.H.W., Liu, R., Bowers, H., et al., J. Appl. Phys., 2016, vol. 119, p. 223902.

    Article  ADS  Google Scholar 

  15. Kurbatova, N.V., Galyautdinov, M.F., Ivanov, N.A., Kolesnikov, S.S., Papernyi, V.L., Osin, Yu.N., and Stepanov, A.L., Phys. Solid State, 2013, vol. 55, p. 1899.

    Article  ADS  Google Scholar 

  16. Dresselhaus, M.S. and Kalish, R., Ion Implantation in Diamond, Graphite and Related Materials, Berlin: Springer, 1992.

    Book  Google Scholar 

  17. Khmelnitskiy, R.A., Cand. Sci. (Phys.–Math.) Dissertation, Moscow: Lebedev Phys. Inst., Russ. Acad. Sci., 2008.

    Google Scholar 

  18. Khomich, A.V., Khmelnitskiy, R.A., Dravin, V.A., Gippius, A.A., Zavedeev, E.V., and Vlasov, I.I., Phys. Solid State, 2007, vol. 49, no. 9, p. 1661.

    Article  ADS  Google Scholar 

  19. Collins, A.T., Diamond Relat. Mater., 1992, vol. 1, p.457.

    Article  ADS  Google Scholar 

  20. Deslandes, A., Guenette, M.C., Belay, K., et al., Nucl. Instrum. Methods Phys. Res., Sect. B, 2015, vol. 365, p.331.

    Article  ADS  Google Scholar 

  21. Hushur, A., Manghnani, M., Werheit, H., et al., J. Phys.: Condens. Matter, 2016, vol. 28, p. 045403.

    ADS  Google Scholar 

  22. Domnich, V., Reynaud, S., Haber, R.A., and Chhowalla, M., J. Am. Ceram. Soc., 2011, vol. 94, p. 3605.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Zavoisky Physical-Technical Institute, Federal Research Center “Kazan Scientific Center of the Russian Academy of Sciences,”, Kazan, 420029, Russia

    A. L. Stepanov, V. I. Nuzhdin, M. F. Galyautdinov, V. F. Valeev, N. V. Kurbatova, V. V. Vorobev & Y. N. Osin

  2. Interdisciplinary Center for Analytical Microscopy, Kazan Federal University, Kazan, 420008, Russia

    A. L. Stepanov, V. V. Vorobev & Y. N. Osin

Authors
  1. A. L. Stepanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. I. Nuzhdin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. F. Galyautdinov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. F. Valeev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. N. V. Kurbatova
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. V. V. Vorobev
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Y. N. Osin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. L. Stepanov.

Additional information

Original Russian Text © A.L. Stepanov, V.I. Nuzhdin, M.F. Galyautdinov, V.F. Valeev, N.V. Kurbatova, V.V. Vorobev, Y.N. Osin, 2018, published in Izvestiya Rossiiskoi Akademii Nauk, Seriya Fizicheskaya, 2018, Vol. 82, No. 8, pp. 1153–1157.

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Stepanov, A.L., Nuzhdin, V.I., Galyautdinov, M.F. et al. A Diamond Diffraction Grating Formed via Ion Implantation. Bull. Russ. Acad. Sci. Phys. 82, 1047–1051 (2018). https://doi.org/10.3103/S1062873818080403

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3103/S1062873818080403

Search

Navigation