Abstract
A brief review of the methods of pulsed acoustic microscopy is presented. The problems and possibilities of nondestructive ultrasonic high-resolution monitoring are discussed. It is shown that methods of pulsed acoustic microscopy can be used to control the integrity of multilayer constructions and associated mechanical units. Micron resolution of acoustic images is attained by focusing the probing ultrasonic beam (50–100 MHz). Original results obtained in joint efforts with developers of 3D miroelectronics and the technology for producing turbine blades are presented.
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Original Russian Text © Y.S. Petronyuk, E.S. Morokov, V.M. Levin, 2015, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2015, Vol. 79, No. 10, pp. 1425–1431.
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Petronyuk, Y.S., Morokov, E.S. & Levin, V.M. Methods of pulsed acoustic microscopy in industrial diagnostics. Bull. Russ. Acad. Sci. Phys. 79, 1268–1273 (2015). https://doi.org/10.3103/S1062873815100184
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DOI: https://doi.org/10.3103/S1062873815100184