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Coefficient of detector collection

  • Proceedings of the XVIII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Used in Solid-State Physics SEM-2013
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

An analytical model for the coefficient of collection for an SEM detector field is proposed. The Dirichlet problem for calculating the detector’s electrostatic field is solved. The trajectories of secondary electrons are calculated numerically. Collection efficiency diagrams for different ratios of work length to pole piece diameter are constructed. The results could be useful for linear measurements of nanoscale structures and modeling the reference signal in electron beam lithography.

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Authors and Affiliations

  1. Moscow State Technical Institute of Radioengineering, Electronics, and Automation, Moscow, 119454, Russia

    O. D. Potapkin & A. A. Melnikov

Authors
  1. O. D. Potapkin
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  2. A. A. Melnikov
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Corresponding author

Correspondence to O. D. Potapkin.

Additional information

Original Russian Text © O.D. Potapkin, A.A. Melnikov, 2014, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2014, Vol. 78, No. 9, pp. 1067–1070.

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Potapkin, O.D., Melnikov, A.A. Coefficient of detector collection. Bull. Russ. Acad. Sci. Phys. 78, 829–832 (2014). https://doi.org/10.3103/S1062873814090238

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  • DOI: https://doi.org/10.3103/S1062873814090238

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