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A digital moiré fringe method for displacement sensors

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Abstract

In this study, a displacement measurement method based on digital moiré fringe is described and experimentally demonstrated. The method is formed by only one grating with a constant pitch. First, the magnified grating image is received by an imaging array and is sent to a computer. Then, the digital moiré fringes are generated by overlaying the grating image with its mirrored one. Finally, a specifically designed algorithm is used to obtain the fringes’ phase difference before and after movement and calculate the displacement. This method has the effects of amplifying displacement and averaging the grating lines error, the same as the traditional moiré technique using two pieces of gratings. At the same time, the proposed system is much easier to assemble and the measurement resolution can be set more flexibly. One displacement measuring system based on this method was built up. Experiment results show that its measurement errors are less than 0.3 μm and less than 0.12 μm at the resolutions of 0.1 μm and 0.03 μm, respectively.

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Authors and Affiliations

  1. State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instrument, Zhejiang University, Hangzhou, 310027, China

    Jian Wu, Ting-ting Zhou, Bo Yuan & Li-qiang Wang

Authors
  1. Jian Wu
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  2. Ting-ting Zhou
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  3. Bo Yuan
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  4. Li-qiang Wang
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Corresponding author

Correspondence to Bo Yuan.

Additional information

Project supported by the National Natural Science Foundation of China (No. 61205159)

ORCID: Jian WU, http://orcid.org/0000-0001-9943-8341

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Wu, J., Zhou, Tt., Yuan, B. et al. A digital moiré fringe method for displacement sensors. Frontiers Inf Technol Electronic Eng 17, 946–953 (2016). https://doi.org/10.1631/FITEE.1500270

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  • DOI: https://doi.org/10.1631/FITEE.1500270

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