Abstract
This paper introduces a fabrication method to achieve sub-15 nm line-and-space (L/S) patterns by combining grapho- and chemo-epitaxy using poly(styrene-block-methyl methacrylate) copolymer (PS-b-PMMA). The fabrication method is simple, since it eliminates photoresist stripping and also does not require any special materials to form pinning patterns. In this process, the ridges formed on spin-on-glass (SOG) surface work as physical guides and the photoresists on them are utilized as a pinning layer. Fine PS-b-PMMA L/S patterns were obtained in sufficient critical dimension (CD) range of the guide patterns that corresponded to the 15% dose margin using ArF immersion lithography. 3-dimensional grid defects were found to be the origin of the short defects. The half-pitch (hp) 15 nm L/S patterns were transferred successfully to SOG/spin-on-carbon (SOC) stacked substrate. p] We also describe fabrication of sub-10 nm L/S patterns using a high-chi block copolymer (BCP).
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Acknowledgments
This work was partly funded by the New Energy and Industrial Technology Development Organization (NEDO) under the EIDEC project. We would like to thank Mr. Satoshi Nomura for technical supports.
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Sato, H., Seino, Y., Kihara, N. et al. Directed self-assembly lithography for half-pitch sub-15 nm pattern fabrication process. MRS Online Proceedings Library 1750, 24–35 (2015). https://doi.org/10.1557/opl.2015.342
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DOI: https://doi.org/10.1557/opl.2015.342