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Cathodoluminescence microscopy: Optical imaging and spectroscopy with deep-subwavelength resolution

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An Erratum to this article was published on 08 May 2015

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Abstract

This article describes a new microscope, based on angle-resolved cathodoluminescence (CL) imaging spectroscopy, which enables optical imaging and spectroscopy at deep-subwavelength spatial resolution. We used a free electron beam in a scanning electron microscope as a direct excitation source for polarizable materials, and we collected the emitted coherent visible/infrared CL radiation using a specially designed optical collection system that is integrated in the electron microscope. We have demonstrated the use of this new technique for the excitation of plasmons in single metal nanoparticles, surface plasmon polaritons at metal surfaces, resonant Mie modes in dielectric nanostructures, and cavity modes and Bloch modes in photonic crystals. Using angle-resolved detection, we are able to derive the nature of localized modes and the dispersion of propagation modes in dielectric and plasmonic geometries. An outlook about new directions and applications of CL imaging spectroscopy is also provided.

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Acknowledgements

This article reviews work carried out in collaboration with Jorik van de Groep, Felipe Bernal Arango, and Femius Koenderink (AMOLF); David Schoen and Mark Brongersma (Stanford University); Humeyra Caglayan and Nader Engheta (University of Pennsylvania); Javier García de Abajo, Martin Kuttge, Jan Renger, and Niek van Hulst (ICFO, Barcelona); and Riccardo Sapienza (Kings College). Technical support, design, and fabrication from Hans Zeijlemaker, Ilya Cerjak, Wim Brouwer, and Jan van der Linden are gratefully acknowledged. This work is part of the research program of the Foundation for Fundamental Research on Matter (FOM), which is financially supported by the Netherlands Organization for scientific Research. It is also supported by the European Research Counsel and by NanoNextNL, a research program funded by the Dutch Ministry of Economic Affairs.

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Authors and Affiliations

  1. Center for Nanophotonics, FOM Institute AMOLF, The Netherlands

    Toon Coenen, Benjamin J. M. Brenny, Ernst Jan Vesseur & Albert Polman

Authors
  1. Toon Coenen
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  2. Benjamin J. M. Brenny
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  3. Ernst Jan Vesseur
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  4. Albert Polman
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Additional information

The following article is based on the Innovation in Materials Characterization Award presentation given by Albert Polman at the 2014 Materials Research Society Spring Meeting in San Francisco. Polman was recognized “For the development, application, and commercialization of Angle-Resolved Cathodoluminescence Imaging Spectroscopy as a new tool for optical imaging at the nanoscale, with applications in nanophotonics and materials science in general.”

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Coenen, T., Brenny, B.J.M., Vesseur, E.J. et al. Cathodoluminescence microscopy: Optical imaging and spectroscopy with deep-subwavelength resolution. MRS Bulletin 40, 359–365 (2015). https://doi.org/10.1557/mrs.2015.64

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