Abstract
Chromatography-mass-spectrometry was used to examine the stability of admixtures of C1−C7 hydrocarbons, fluorine and chlorinated derivatives of hydrocarbons, alkyl derivatives of silane, homologs of monosilane, and siloxanes in monosilane in its storage in molybdenum-glass ampules and stainless-steel cylinders. It was found that, in the case of storage in glass ampules, the concentration of ethylene and tetrafluoroethylene admixtures decreases and that of ethyl silane and disilane increases. When monosilane is stored in a stainless steel cylinder, the concentration of the acetylene admixture it contains changes.
Similar content being viewed by others
References
Becker, P., Schiel, D., Pohl, H.-J., Kaliteevski, A.K., Godisov, O.N., Churbanov, M.F., and Dianov, E.M., Meas. Sci. Technol., 2006, vol. 17, pp. 1854–1860.
Becker, P., Bettin, H., De Bievre Holm, S., Kutgens, U., Spieweck, F., Stumpel, J., Valkiers, S., and Zulehner, W., IEEE Trans. Instrum. Meas., 1995, vol. 45, pp. 522–525.
Devyatykh, G.G., Bulanov, A.D., Gusev, A.. Kovalev, I.D., Krylov, V.A., Potapov, A.M., Sennikov, P.G., Adamchik, S.A., Gavva, V.A., Kotkov, A.P., Churbanov, M.F., Dianov, E.M., Kaliteevskii, A.K., Godisov, O.N., Pohl, H.-J., Becker, P., Riemann, H., and Abrosimov, N.V., Russ. Reports Acad. Sci. 2008, vol. 421, no. 1, pp. 61–64.
Churbanov, M.F., Gusev, A.V., Bulanov, A.D., and Potapov, A.M., Russ. Chem. Bull., 2013, no. 2, pp. 275–280.
Takyu, K., Itoh, K.M., Oka, K., Saito, N., and Ozhogin, V.I., Jpn. J. Appl. Phys., 1999, vol. 38, pp. 1493–1495.
Inyushkin, A.V., Inorg. Mater., 2002, vol. 38, no. 5, pp. 527–534.
Krylov, V.A., Chernova, O.Yu., and Sozin, A.Yu., Mass- Spektrom., 2007, vol. 4, no. 2, pp. 125–130.
Krylov, V.A., Sozin, A.Yu., Zorin, V.A., Berezkin, V.G., and Krylov, A.V., Mass-Spektrom., 2008, vol. 6, no. 4, pp. 225–233.
Krylov, V.A., Chernova, O.Yu., and Sozin, A.Yu., Anal. Kontrol, 2011, vol. 5, no. 4, pp. 421–428.
White, G. and Rochow, E.G., J. Am. Chem. Soc., 1954, vol. 76, pp. 3897–3902.
US Patent 2 537 763 (publ. 1951).
US Patent 2 786 862 (publ. 1957).
Itoh, M., Iwata, K., and Mitsuzuka, M., Appl. Catal., A, 2001, vol. 217, pp. 185–189.
US Patent 4 554 141 (publ. 1992).
Votintsev, V.N., Mikheev, V.S., and Smirnov, V.N., Vysokochist. Veshchestva, 1988, no. 12, pp. 17–28.
Neudorfi, P., Jodhan, A., and Strausz, O.P., J. Phys. Chem., 1980, vol. 84, no. 3, pp. 338–339.
Skorynin, G.M., Pul’nikov, I.I., Sharin, G.A., and Zyryanov, S.M., Izv. Tom. Politekh. Univ., 2004, vol. 307, no. 7, pp. 88–90.
Devyatykh, G.G., Dianov, E.M., Bulanov, A.D., Troshin, O.Yu., Balabanov, V.V., and Priakhin, D.A., Russ. Reports Acad. Sci., 2003, vol. 391, no. 5, pp. 638–639.
Berezkin, V.G., Korolev, A.A., and Khotimsky, V.S., Russ. Reports Acad. Sci., 2000, vol. 370, no. 2, pp. 200–204.
Agafonov, I.L. and Devyatykh, G.G., Mass-spektrometricheskii analiz gazov i parov osoboi chistoty (Mass-Spectrometric Analysis of Special-Purity Gases and Vapors), Moscow: Nauka, 1980.
Fitch, W.L., Anal. Chem., 1983, vol. 55, no. 6, pp. 832–835.
Mathieu, J. and Panico, R., Mécanismes Réactionnels en Chimie Organique, Hermann, 1972.
Author information
Authors and Affiliations
Corresponding author
Additional information
Russian Text © The Author(s), 2019, published in Zhurnal Prikladnoi Khimii, 2019, Vol. 92, No. 4, pp. 436−441.
Rights and permissions
About this article
Cite this article
Sozin, A.Y., Krylov, V.A., Chernova, O.Y. et al. Study of the Stability of a Number of Molecular Impurities in Monosilane. Russ J Appl Chem 92, 476–481 (2019). https://doi.org/10.1134/S1070427219040025
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1070427219040025