Abstract
We have developed, manufactured, and tested a system of low-profile scanning probe microscopy (SPM) deflectometer capable of increasing the numerical aperture of objectives to a record high value of NA = 0.75. Implementation of this system will significantly improve performance characteristics of the optical microspectroscopy (OM) methods realized in combined SPM/OM systems.
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Funding
This work was supported in part by the Russian Science Foundation, project no. 18-19-00718.
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Mezin, A.V., Efimov, A.E., Solovyeva, D.O. et al. Developing Low-Profile Deflectometer for Combined Scanning Probe and Optical Microscopy Systems. Tech. Phys. Lett. 47, 287–289 (2021). https://doi.org/10.1134/S1063785021030238
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DOI: https://doi.org/10.1134/S1063785021030238