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Increased Efficiency and Duration of Emission from Carbon Nanotubes Processed in Ammonia Plasma

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Abstract

A technique for obtaining carbon nanotubes (CNTs) doped with nitrogen in ammonia plasma has been developed. In this technique, CNTs synthesized by a method excluding their doping with nitrogen are post-treated in ammonia plasma. This treatment leads to a more than fivefold increase in the concentration of nitrogen (from 0.7 to 3.6 at %), a sixfold decrease in the resistance, and a 10% decrease in the work function of CNTs, resulting in stabilization of the process of cold electron emission.

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Funding

This work was supported in part by the Ministry of Education and Science of the Russian Federation (project no. 0004-2019-0003) and performed using the unique equipment of the KUTGI complex at the Institute of Nanotechnologies of Microelectronics (Moscow).

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Authors and Affiliations

  1. Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, 119991, Moscow, Russia

    S. V. Bulyarskiy, V. S. Belov, A. V. Lakalin, M. S. Molodenskii, A. A. Pavlov & A. V. Terent’ev

  2. Scientific-Manufacturing Complex “Technological Center”, 124498, Zelenograd, Moscow, Russia

    S. V. Bulyarskiy, E. P. Kitsyuk, R. M. Ryazanov & A. A. Shamanaev

  3. National Research University of Electronic Technology (MIET), 124498, Zelenograd, Moscow, Russia

    V. S. Belov

Authors
  1. S. V. Bulyarskiy
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  2. V. S. Belov
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  3. E. P. Kitsyuk
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  4. A. V. Lakalin
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  5. M. S. Molodenskii
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  6. A. A. Pavlov
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  7. R. M. Ryazanov
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  8. A. V. Terent’ev
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  9. A. A. Shamanaev
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Correspondence to S. V. Bulyarskiy.

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Translated by P. Pozdeev

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Bulyarskiy, S.V., Belov, V.S., Kitsyuk, E.P. et al. Increased Efficiency and Duration of Emission from Carbon Nanotubes Processed in Ammonia Plasma. Tech. Phys. Lett. 46, 996–999 (2020). https://doi.org/10.1134/S1063785020100193

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  • DOI: https://doi.org/10.1134/S1063785020100193

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