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Studying Near-Surface Layers of Germanium Implanted with Cobalt Ions

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Abstract

Results of an investigation of the surface of germanium nanostructured by means of ion implantation are presented. Single-crystalline germanium (c-Ge) plates were irradiated by 40-keV cobalt Co+ ions in a dose range of (2–8) × 1016 ion/cm2. Evolution of the germanium surface morphology with increasing ion dose was studied by method of scanning electron microscopy. It is established that an increase in the ion implantation dose is accompanied by gradual formation of a surface layer consisting of spherical particles with diameters of ~150 nm. Analysis of the X-ray diffraction patterns of samples was indicative of the appearance of nanosized cobalt germanide (CoGe) particles in the ion-implanted surface layer.

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Funding

This study was supported in part by the Russian Foundation for Basic Research jointly with the Republic of Tatarstan, project no. 18-48-160027_r_a. The XRD study was supported by a state order to the Kazan Scientific Center of the Russian Academy of Sciences (Tatarstan).

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Authors and Affiliations

  1. Kazan E.K. Zavoisky Physical Technical Institute, Kazan Scientific Center, Russian Academy of Sciences, 420029, Kazan, Tatarstan, Russia

    V. V. Bazarov, V. A. Shustov, N. M. Lyadov, I. A. Faizrakhmanov, I. V. Yanilkin, S. M. Khantimerov, R. R. Garipov, R. R. Fatykhov, N. M. Suleimanov & V. F. Valeev

  2. Kazan Federal University, 420008, Kazan, Tatarstan, Russia

    I. V. Yanilkin

  3. Kazan State Power Engineering University, 420066, Kazan, Tatarstan, Russia

    N. M. Suleimanov

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  1. V. V. Bazarov
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  2. V. A. Shustov
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  3. N. M. Lyadov
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  4. I. A. Faizrakhmanov
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  5. I. V. Yanilkin
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  6. S. M. Khantimerov
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  7. R. R. Garipov
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  8. R. R. Fatykhov
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  9. N. M. Suleimanov
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  10. V. F. Valeev
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Corresponding author

Correspondence to V. V. Bazarov.

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The authors declare that they have no conflict of interest.

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Translated by P. Pozdeev

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Bazarov, V.V., Shustov, V.A., Lyadov, N.M. et al. Studying Near-Surface Layers of Germanium Implanted with Cobalt Ions. Tech. Phys. Lett. 45, 1047–1049 (2019). https://doi.org/10.1134/S1063785019100183

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  • DOI: https://doi.org/10.1134/S1063785019100183

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