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A study of products formed in ablation of single-crystal silicon in aqueous medium under irradiation with nanosecond pulses from fiber-optic ytterbium laser

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Abstract

Products formed in laser ablation of single-crystal silicon beneath a water layer under irradiation with nanosecond pulses from a fiber-optic ytterbium laser have been studied. SEM images of structures deposited by dewatering of the colloid solution formed in the course of the ablation are presented. IR spectroscopy and Raman spectroscopy were used to determine their chemical composition and structural features.

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Authors and Affiliations

  1. St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, St. Petersburg, 197101, Russia

    V. P. Veiko, D. S. Polyakov, A. M. Skvortsov & E. S. Chopenko

Authors
  1. V. P. Veiko
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  2. D. S. Polyakov
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  3. A. M. Skvortsov
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  4. E. S. Chopenko
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Corresponding author

Correspondence to D. S. Polyakov.

Additional information

Original Russian Text © V.P. Veiko, D.S. Polyakov, A.M. Skvortsov, E.S. Chopenko, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 9, pp. 52–58.

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Veiko, V.P., Polyakov, D.S., Skvortsov, A.M. et al. A study of products formed in ablation of single-crystal silicon in aqueous medium under irradiation with nanosecond pulses from fiber-optic ytterbium laser. Tech. Phys. Lett. 43, 435–438 (2017). https://doi.org/10.1134/S1063785017050121

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  • DOI: https://doi.org/10.1134/S1063785017050121

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