Abstract
First-order phase transitions induced in aluminum metallization layers by the passage of single rectangular current pulses with amplitude up to 8 × 1010 A/m2 and durations within 100–1000 μs are considered. The formation of local fused zones and their subsequent migration during current passage have been experimentally studied. The main mechanisms of interphase boundary propagation due to heat evolution at the solid/liquid interface under conditions of nonstationary heating of the metal film are established. The velocity of liquid-phase propagation (∼25 m/s) along the metallization stripe has been determined in experiment and a method of calculating the length of a fused zone upon the current pulse passage is proposed.
Similar content being viewed by others
References
M. van Soestbergen, A. Mavinkurve, R. T. H. Rongen, K. M. B. Jansen, L. J. Ernst, and G. Q. Zhang, Acta Electrochim. 55, 5459 (2010).
C.-K. Hu, J. Ohm, L. M. Gignac, C. M. Breslin, S. Mittal, et al., J. Appl. Phys. 111, 093722 (2012).
T. A. Nguyen, P.-Y. Joubert, S. Lefebvre, G. Chaplier, and L. Rousseau, Microelectron. Reliab. 51, 1127 (2011).
Zhenqiang Ma and Gary S. Was, J. Mater. Res. 14(10), 4051 (1999).
J. H. Zhang, Y. C. Chan, M. O. Alam, and S. Fu, Microelectron. Reliab. 43, 1303 (2003).
A. A. Polishchuk, Sovrem. Elektron., No. 4, 20 (2006).
O. A. Gerasimchuk, K. A. Epifantsev, T. V. Pavlova, and P. K. Skorobogatov, Mikroelektronika 40(3), 230 (2011).
A. A. Skvortsov, V. V. Rybin, and S. M. Zuev, Tech. Phys. Lett. 36(3), 282 (2010).
A. A. Skvortsov, A. M. Orlov, and V. E. Muradov, Tech. Phys. Lett. 35(7), 606 (2009).
D. K. Belashchenko, A. M. Orlov, and S. P. Orlova, Teplofiz. Vys. Temp. 14(3), 580 (1976).
Physical Quantities: A Reference Book, Ed. by I. S. Grigor’ev and E. Z. Meilikhov (Energoatomizdat, Moscow, 1991) [in Russian].
H. S. Carslaw and J. C. Jaeger, Conduction of Heat in Solids, 2nd ed. (Clarendon Press, Oxford, 1959).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.A. Skvortsov, S.G. Kalenkov, M.V. Koryachko, 2014, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 40, No. 18, pp. 24–32.
Rights and permissions
About this article
Cite this article
Skvortsov, A.A., Kalenkov, S.G. & Koryachko, M.V. Phase transformations in metallization systems under conditions of nonstationary thermal action. Tech. Phys. Lett. 40, 787–790 (2014). https://doi.org/10.1134/S1063785014090302
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063785014090302