Abstract
A technology of creation of annular silicon field emitters with bilayer metal–fullerene coating has been developed and their performance has been studied. It has been shown that annular emitters with a surface area of about 0.3 cm2 provide a current up to 100–110 mA and stably operate under conditions of technical vacuum (~10–7 Torr).
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Sominskii, G.G., Tumareva, T.A., Taradaev, E.P. et al. Annular Multi-Tip Field Emitters with Metal–Fullerene Protective Coatings. Tech. Phys. 64, 270–273 (2019). https://doi.org/10.1134/S106378421902021X
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DOI: https://doi.org/10.1134/S106378421902021X