Abstract
The influence of the pressure of working gas during the ion–plasma sputtering on properties of deposited ferroelectric barium strontium titanate coatings has been experimentally studied. Variations in the of pressure of the working gas during deposition allows the component composition of the deposited layer to be changed, which leads to the diffusion of the phase transition and the improvement of temperature stability of properties of ferroelectric film. The gradation of layers has an impact on the temperature of the dielectric permittivity maximum, the shape of the dependence of the capacity on temperature, and the capacitance–voltage characteristics of the capacitor structures.
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References
A. Aftab, A. G. Irene, and K. K. Amir, Appl. Phys. Rev. 2, 011302 (2015).
S. Gevorgian, Ferroelectrics in Microwave Devices, Circuits and Systems (Springer, London, 2009).
Physics of Ferroelectrics. A Modern Perspective, Ed. by K. M. Rabe, C. H. Ahn, and J.-M. Triscone (Springer, New York, 2007).
A. P. Barranco, Advances in Ferroelectrics (InTech, Havana, 2012).
A. V. Tumarkin, E. R. Tepina, E. A. Nenasheva, N. F. Kartenko, and A. B. Kozyrev, Tech. Phys. 57, 787 (2012).
A. B. Kozyrev, M. M. Gaidukov, A. G. Gagarin, A. V. Tumarkin, and S. V. Razumov, Tech. Phys. Lett. 28, 239 (2002).
A. Kozyrev, A. Ivanov, O. Soldatenkov, A. Tumarkin, S. Ivanova, T. Kaydanova, J. D. Perkins, J. Alleman, D. S. Ginley, L. Sengupta, L. Chiu, and X. Zhang, Integr. Ferroelectr. 55, 847 (2003).
V. Mantese and S. P. Aplay, Graded Ferroelectrics, Transpacitors and Transponents (Springer, New York, 2005).
M. W. Cole, Ferroelectrics 470, 67 (2014).
M. M. Gaidukov, A. V. Tumarkin, A. G. Gagarin, and A. B. Kozyrev, Tech. Phys. Lett. 40, 337 (2014).
J. Sigman, P. G. Clem, and C. D. Nordquist, J. Appl. Phys. 102, 054106 (2007).
V. A. Volpyas, A. V. Tumarkin, A. K. Mikhailov, A. B. Kozyrev, and R. A. Platonov, Tech. Phys. Lett. 42, 758 (2016).
A. V. Tumarkin, I. T. Serenkov, V. I. Sakharov, V. V. Afrosimov, and A. A. Odinets, Phys. Solid State 58, 364 (2016).
A. V. Tumarkin, V. I. Al’myashev, S. V. Razumov, M. M. Gaidukov, A. G. Gagarin, A. G. Altynnikov, and A. B. Kozyrev, Phys. Solid State 57, 553 (2015).
V. A. Volpyas and A. B. Kozyrev, J. Exp. Theor. Phys. 113, 172 (2011).
S. A. Kukushkin and V. V. Slezov, Disperse Systems on the Surface of Solid Bodies. Thin-Film Formation Mechanisms (Evolutionary Approach) (Nauka, St. Petersburg, 1996).
S. A. Kukushkin, Thin Solid Films 207, 302 (1992).
O. G. Vendik, Ferroelectrics in Engineering (Sovetskoe Radio, Moscow, 1979).
L. Pálová, P. Chandra, and K. M. Rabe, Phys. Rev. B: Condens. Matter Mater. Phys. 76, 014112 (2007).
N. A. Pertsev, R. Dittmann, R. Plonka, and R. Wase, J. Appl. Phys. 101, 074102 (2007).
T. Samoilova, M. Gaidukov, A. Tumarkin, A. Gagarin, A. Altynnikov, and A. Kozyrev, J. Appl. Phys. 115, 204103 (2014).
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Original Russian Text © A.V. Tumarkin, S.V. Razumov, V.A. Volpyas, A.G. Gagarin, A.A. Odinets, M.V. Zlygostov, E.N. Sapego, 2017, published in Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 87, No. 10, pp. 1585–1591.
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Tumarkin, A.V., Razumov, S.V., Volpyas, V.A. et al. Thermostable ferroelectric capacitors based on graded films of barium strontium titanate. Tech. Phys. 62, 1592–1598 (2017). https://doi.org/10.1134/S1063784217100231
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DOI: https://doi.org/10.1134/S1063784217100231