Abstract
A system of analytical characteristics is proposed to estimate the results of glow-discharge nitriding using the energy concepts of this process. The following parallel subprocesses, which form a modified surface layer, are taken into account: the formation of nitride structures, the diffusion of nitrogen deep into a metal, and surface sputtering.
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I. M. Pastukh, Tech. Phys. 61, 76 (2016).
I. M. Pastukh, Tech. Phys. 58, 1228 (2013).
I. M. Pastukh, Tech. Phys. 59, 1320 (2014).
D. P. Woodruff and T. A. Delchar, Modern Techniques of Surface Science (Cambridge Univ. Press, Cambridge, 1986; Mir, Moscow, 1989).
Ya. I. Gerasimov, et al., Course of Physical Chemistry (Khimiya, Moscow, 1970), Vols. 1–2.
Yu. P. Raizer, Fundamentals of Modern Physics of Gas-Discharge Processes (Nauka, Moscow, 1980).
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Original Russian Text © I.M. Pastukh, G.N. Sokolova, 2016, published in Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 86, No. 11, pp. 57–63.
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Pastukh, I.M., Sokolova, G.N. Analytical criteria for controlling glow-discharge nitriding. Tech. Phys. 61, 1661–1667 (2016). https://doi.org/10.1134/S1063784216110165
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DOI: https://doi.org/10.1134/S1063784216110165