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Sensitive elements of vacuum sensors based on porous nanostructured SiO2-SnO2 sol-gel films

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Abstract

The objects of investigation are porous nanostructured SiO2-SnO2 sol-gel films used as sensitive elements on vacuum sensors. The properties of the films with spherical, labyrinth, and percolation mesh structures are analyzed. It is shown that the resistance of sensitive elements based on these films sharply drops at a pressure below the atmospheric value. Processes taking place in the films at subatmospheric pressures are studied. It is found that the desorption of water vapor increases the resistance of the sensitive elements of vacuum sensors, whereas the desorption of carbon dioxide and oxygen decreases the resistance. This agrees with experimental data.

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Authors and Affiliations

  1. Penza State University, Krasnaya ul. 40, Penza, 440026, Russia

    I. A. Averin, S. E. Igoshina, A. A. Karmanov & I. A. Pronin

  2. St. Petersburg State Electrotechnical University LETI, ul. Prof. Popova 5, St. Petersburg, 197376, Russia

    V. A. Moshnikov

  3. Ioffe Physical Technical Institute, Russian Academy of Scienes, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    E. I. Terukov

Authors
  1. I. A. Averin
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  2. S. E. Igoshina
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  3. V. A. Moshnikov
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  4. A. A. Karmanov
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  5. I. A. Pronin
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  6. E. I. Terukov
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Correspondence to I. A. Averin.

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Original Russian Text © I.A. Averin, S.E. Igoshina, V.A. Moshnikov, A.A. Karmanov, I.A. Pronin, E.I. Terukov, 2015, published in Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 85, No. 6, pp. 143–147.

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Averin, I.A., Igoshina, S.E., Moshnikov, V.A. et al. Sensitive elements of vacuum sensors based on porous nanostructured SiO2-SnO2 sol-gel films. Tech. Phys. 60, 928–932 (2015). https://doi.org/10.1134/S106378421506002X

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  • DOI: https://doi.org/10.1134/S106378421506002X

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