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Investigation of the Parameters of Superconducting and Insulating Elements of Structures Obtained on YBCO Films by Master Mask with Decreasing Their Size

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Abstract

This study is devoted to the investigation of the electrophysical parameters of superconducting and insulating elements of planar structures manufactured by master mask based on the high-temperature superconductor YBa2Cu3O7 – d with a decrease in the size of the elements to values of the order of one micrometer. Using standard photolithography, the method of master mask was used to obtain structures with superconducting elements with the width of 2 μm and parameters sufficient for instrumental applications.

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Funding

The study was carried out with financial support of Russian Foundation for Basic Research as a part of scientific project no. 20-08-01006. The equipment of the Center for Collective Use of Institute for Physics of Microstructures of Russian Academy of Sciences “Physics and Technology of Micro- and Nanostructures” was used.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Federal Research Center of Institute of Applied Physics, Russian Academy of Sciences, Nizhny, Novgorod, Russia

    D. V. Masterov, S. A. Pavlov, A. E. Parafin & E. V. Skorokhodov

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  1. D. V. Masterov
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  2. S. A. Pavlov
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  3. A. E. Parafin
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  4. E. V. Skorokhodov
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Corresponding author

Correspondence to A. E. Parafin.

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The authors declare that they have no conflicts of interest.

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Translated by S. Rostovtseva

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Masterov, D.V., Pavlov, S.A., Parafin, A.E. et al. Investigation of the Parameters of Superconducting and Insulating Elements of Structures Obtained on YBCO Films by Master Mask with Decreasing Their Size. Phys. Solid State 63, 1480–1484 (2021). https://doi.org/10.1134/S1063783421090262

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  • DOI: https://doi.org/10.1134/S1063783421090262

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