Abstract
The initial stages of the growth of ferroelectric barium strontium titanate films on single-crystal silicon carbide substrates have been studied for the first time. The choice of a substrate with high thermal conductivity has been due to the possibility of applying these structures in powerful microwave devices. The temperature ranges separating the mechanism of the surface diffusion of deposited atoms from the diffusion via a gaseous phase during the growth of multicomponent films have been determined. The studies show that the mass transfer by means of surface diffusion leads to the formation of small-height nuclei that cover a large area of the substrate, whereas the mass transfer via a gaseous phase leads to the formation of a “columnar” islandtype structure with small percentage of covering the substrate and larger island heights.
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References
C. Luo, J. Ji, F. Ling, D. Li, and J. Yao, J. Alloys Compd. 687, 458 (2016).
J. W. Kim, H. Shima, T. Yamamoto, S. Yasui, H. Funakubo, T. Yamada, and K. Nishida, in Proceedings of the IEEE International Symposium on the Applications of Ferroelectric ISAF, 2016, p. 7172665.
G. Ya. Krasnikov, N. A. Zaitsev, V. P. Bokarev, and Yu. I. Plotnikov, Elektron. Tekh., Ser. 3: Mikroelektron., No. 1 (161), 42 (2016).
O. G. Vendik, Phys. Solid State 51, 1529 (2009).
O. Soldatenko, T. Samoilov, A. Ivanov, A. Kozyrev, D. Ginley, and T. Kaydanova, Appl. Phys. Lett. 89, 232 (2006).
L. Song, Y. Chen, G. Wang, L. Yang, J. Ge, X. Dong, P. Xiang, Y. Zhang, and X. Tang, J. Am. Ceram. Soc. 97, 3048 (2014).
A. V. Tumarkin, S. V. Razumov, A. G. Gagarin, A. A. Odinets, A. K. Mikhailov, I. P. Pronin, V. M. Stozharov, S. V. Senkevich, and N. K. Travin, Tech. Phys. Lett. 42, 423 (2016).
S. V. Razumov, A. V. Tumarkin, M. M. Gaidukov, A. G. Gagarin, A. B. Kozyrev, O. G. Vendik, A. V. Ivanov, O. U. Buslov, V. N. Keys, L. C. Sengupta, and X. Zhang, Appl. Phys. Lett. 81, 1675 (2002).
S. A. Kukushkin, V. V. Slezov, Dispersed Systems on Solid State Surface: Mechanism of Thin Films Formation (Evolution Approach) (Nauka, St. Petersburg, 1996) [in Russian].
S. A. Kukushkin and A. V. Osipov, J. Appl. Phys. 86, 1370 (1999).
S. A. Kukushkin, Thin Solid Films 207, 302 (1992).
S. A. Kukushkin and A. V. Osipov, Prog. Surf. Sci. 51, 1 (1996).
V. V. Afrosimov, R. N. Il’in, S. F. Karmanenko, V. I. Sakharov, and I. T. Serenkov, Phys. Solid State 45, 1122 (2003).
A. V. Tumarkin, I. T. Serenkov, and V. I. Sakharov, Phys. Solid State 52, 2561 (2010).
A. V. Tumarkin, S. A. Kukushkin, A. V. Osipov, A. V. Ankudinov, and A. A. Odinets, Phys. Solid State 57, 815 (2015).
A. V. Tumarkin, I. T. Serenkov, V. I. Sakharov, V. V. Afrosimov, and A. A. Odinets, Phys. Solid State 58, 364 (2016).
A. V. Tumarkin, V. I. Al’myashev, S. V. Razumov, M. M. Gaidukov, A. G. Gagarin, A. G. Altynnikov, and A. B. Kozyrev, Phys. Solid State 57, 553 (2015).
V. V. Afrosimov, R. N. Il’in, S. F. Karmanenko, F. F. Melkov, V. I. Sakharov, and I. T. Serenkov, Thin Solid Films 492, 146 (2005).
J. Roy, S. Chandra, S. Das, and S. Maitra, Rev. Adv. Matter Sci. 38, 29 (2014).
R. G. Munro and S. J. Dapkunas, J. Res. Natl. Inst. Stand. Technol. 98, 607 (1993).
S. V. Razumov, A. V. Tumarkin, M. V. Sysa, and A. G. Gagarin, Tech. Phys. Lett. 29, 175 (2003).
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Original Russian Text © A.V. Tumarkin, I.T. Serenkov, V.I. Sakharov, S.V. Razumov, A.A. Odinets, M.V. Zlygostov, E.N. Sapego, V.V. Afrosimov, 2017, published in Fizika Tverdogo Tela, 2017, Vol. 59, No. 12, pp. 2352–2357.
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Tumarkin, A.V., Serenkov, I.T., Sakharov, V.I. et al. Initial stages of the growth of barium strontium titanate films on a semi-isolating silicon carbide substrate. Phys. Solid State 59, 2374–2380 (2017). https://doi.org/10.1134/S1063783417120307
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DOI: https://doi.org/10.1134/S1063783417120307