Skip to main content
SpringerLink
Log in

Changes in the Structure and Properties of Quartz Successively Implanted by Zn and F Ions during Thermal Annealing

  • SURFACE AND THIN FILMS
  • Published:
Crystallography Reports Aims and scope Submit manuscript

Abstract

The temperature dependences of structural and phase transformations in quartz successively implanted by zinc and fluorine during annealing in nitrogen have been studied. Plates were doped with 64Zn+ ions to a dose of 5 × 1016 cm–2 with an energy of 50 keV and then with 19F+ ions to the same dose but with an energy of 17 keV. After the implantation, individual Zn-containing particles about 100 nm in size were found on the sample surface. These particles decrease in size during annealing (by an order of magnitude after annealing at 800°C). The implantation leads to the formation of radiation-induced point defects and their clusters in the quartz bulk. Radiation-induced defects are gradually annealed during the heat treatment, and the phase of metallic zinc is transformed first to its zinc oxide (ZnO) at 600°C and then to willemite (Zn2SiO4) at 800°C.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.
Fig. 7.

Similar content being viewed by others

REFERENCES

  1. S. W. Litton, N. C. Collins, and D. S. Reynolds, Zinc Oxide Material for Electronic and Opto-Elecrtronics Device Application (Wiley, Chichester, 2011).

    Book  Google Scholar 

  2. F. Ren, L. Guo, Y. Shi, et al., J. Phys. D: Appl. Phys. 39, 488 (2006).

    Article  ADS  Google Scholar 

  3. C. Y. Jiang, X. W. Sun, G. Q. Lo, et al., Appl. Phys. Lett. 90, 263501 (2007).

    Article  ADS  Google Scholar 

  4. C. Li, Y. Yang, X. W. Sun, et al., Nanotechnology 18, 135604 (2007).

    Article  ADS  Google Scholar 

  5. S. Chu, M. Olmedo, Zh. Yang, et al., Appl. Phys. Lett. 93, 181106 (2008).

    Article  ADS  Google Scholar 

  6. G. P. Smestad and M. Gratzel, J. Chem. Educ. 75, 752 (1998).

    Article  Google Scholar 

  7. H. Amekura, Y. Takeda, and N. Kishimoto, Mater. Lett. 222, 96 (2011).

    Google Scholar 

  8. Y. Y. Shen, X. D. Zhang, D. C. Zhang, et al., Mater. Lett. 65, 2966 (2011).

    Article  Google Scholar 

  9. B. B. Straumal, A. A. Mazilkin, S. G. Protasova, et al., Phys. Rev. B 79, 205206 (2009).

    Article  ADS  Google Scholar 

  10. C. Liu, H. Zhao, Y. Shen, et al., Nucl. Instrum. Methods Phys. Res. B 326, 23 (2014).

    Article  ADS  Google Scholar 

  11. A. Sirelkhatim, S. Mahmud, A. Seeni, et al., Nano-Micro Lett. 7, 219 (2015).

    Article  Google Scholar 

  12. K. Prashanthi, H. Zhang, R. V. Ramgopal, and T. Thundat, Phys. Status Solidi RRL 6, 77 (2012).

    Article  Google Scholar 

  13. S. Inbasekaran, R. Senthil, G. Ramamurthy, and T. P. Sastry, Int. J. Innov. Res. Sci. Eng. Technol. 3, 8601 (2014).

    Google Scholar 

  14. H. Amekura, N. Umeda, Y. Sakuma, et al., Appl. Phys. Lett. 87, 013109 (2005).

    Article  ADS  Google Scholar 

  15. Y. X. Liu, Y. C. Liu, D. Shen, et al., J. Cryst. Growth 240, 152 (2002).

    Article  ADS  Google Scholar 

  16. V. Privezentsev, V. Kulikauskas, E. Steinman, and A. Bazhenov, Phys. Status Solidi C 10, 48 (2013).

    Article  ADS  Google Scholar 

  17. D. Zatsepin, A. Zatsepin, D. W. Boukhvalov, et al., J. Non-Cryst. Solids 432, 183 (2016).

    Article  ADS  Google Scholar 

  18. N. Hosono, Phys. Rev. Lett. 74, 110 (1995).

    Article  ADS  Google Scholar 

  19. A. N. Magunov, Laser Thermometry of Solids (FIZMATLIT, Moscow, 2001) [in Russian].

    Google Scholar 

Download references

ACKNOWLEDGMENTS

We are grateful to V.G. Plotnichenko for supplying initial quartz samples, V.V. Koltashev for the measuring quartz optical transmission in the IR region, and S.V. Ksenich for the AFM measurements of the sample surface topology.

Author information

Authors and Affiliations

  1. Valiev Institute of Physics and Technology, Russian Academy of Sciences, 117218, Moscow, Russia

    V. V. Privezentsev

  2. Institute of Solid State Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow oblast, Russia

    E. A. Steinman, A. N. Tereshchenko & N. N. Kolesnikov

  3. Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 119991, Moscow, Russia

    A. V. Makunin

Authors
  1. V. V. Privezentsev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. A. Steinman
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. N. Tereshchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. N. N. Kolesnikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. V. Makunin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. V. Privezentsev.

Additional information

Translated by A. Sin’kov

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Privezentsev, V.V., Steinman, E.A., Tereshchenko, A.N. et al. Changes in the Structure and Properties of Quartz Successively Implanted by Zn and F Ions during Thermal Annealing. Crystallogr. Rep. 64, 451–456 (2019). https://doi.org/10.1134/S1063774519030210

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063774519030210

Search

Navigation