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Automation of the Measurement Process of the Parameters of the Sensitive Elements of the Gas Flow Rate Sensors

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Abstract

The study of the characteristics and errors of sensors is as difficult as designing and manufacturing them. The operation of sensors needs to be accurately studied in order to correct the design of sensor models accurately carry out the initial calibration of the ready-made sensors. The stand for investigating the sensitive elements of the gas flow rate sensors, in which the hot-wire anemometric and the calorimetric measurement modes are used, is described. It is shown that the facilities of the automatic control of the gas flow rate and dynamic recording of the measurement results make it possible to process and record the results in millisecond time intervals, investigate the operation of sensitive elements in the pulse mode, and simulate the operation of a microprocessor-based signal processing circuit at the hardware and software levels. The proposed stand makes it possible to take measurements at different gas temperatures and ambient temperatures ranging from –40 to 60°С and control the atmospheric pressure, and it makes it possible to specify the gas flow rate within 0–119 L/min. The considered stand is designed to develop compact sensors of the natural gas flow rate, which could replace the diaphragm flowmeters of the G1.6, G2.5, and G4 series. The stand makes it possible to carry out the comprehensive measurements of sensors in one place and considerably reduces the time of testing the developed converters.

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Authors and Affiliations

  1. Bauman Moscow State Technical University, 105005, Moscow, Russia

    V. T. Ryabov

  2. National Research University of Electronic Technology (MIET), 124498, Zelenograd, Moscow, Russia

    N. A. Djuzhev & D. V. Novikov

Authors
  1. V. T. Ryabov
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  2. N. A. Djuzhev
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  3. D. V. Novikov
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Corresponding author

Correspondence to D. V. Novikov.

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Translated by M. Kromin

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Ryabov, V.T., Djuzhev, N.A. & Novikov, D.V. Automation of the Measurement Process of the Parameters of the Sensitive Elements of the Gas Flow Rate Sensors. Russ Microelectron 48, 490–495 (2019). https://doi.org/10.1134/S1063739719070126

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  • DOI: https://doi.org/10.1134/S1063739719070126

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