Abstract
In atomic force microscopy, the interaction of a probe with a sample is usually controlled by the angle of cantilever bending at a selected point on it using an optical lever. Such control is not designed to record all three components of the interaction-force vector. It is possible to reveal these components and the result of the force action, i.e., the displacement vector of the “nondeformable” probe of an “ideal” cantilever, by additional measurements of the deformation (by the piezoresistive method) or the amount of bending (by the interferometry method) at a selected point, or the bending angle at one more point on the cantilever. In this paper, we present the results of analytical calculation of the optimal location of these points on a cantilever for six combinations of the above three methods, which reduces the measurement error of the components of the force and displacement vectors to a minimum.
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ACKNOWLEDGMENTS
I thank A.M. Minarsky (Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg, Russian Academy of Sciences) for interest in the topic of study and to M.M. Khalisov (Pavlov Institute of Physics, Russian Academy of Sciences) for help in preparing the manuscript.
Funding
The study was in part supported by the Russian Science Foundation, grant no. 19-13-00151.
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Translated by A. Ivanov
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Ankudinov, A.V. On AFM Measurements of the Interaction Force Vector by Means of Interferometry, Optical Lever, and the Piezoresistive Method. J. Surf. Investig. 16, 247–253 (2022). https://doi.org/10.1134/S1027451022030028
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DOI: https://doi.org/10.1134/S1027451022030028