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Influence of High-Energy C60 Ions on the Structure and Bonds of Carbon Coatings

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Abstract

The carbon films formed by accelerated C60 ion deposition are investigated by transmission electron microscopy and X-ray photoelectron spectroscopy. It is demonstrated that amorphous carbon films are formed at an ion-beam energy of 7 keV and a temperature of the substrate of 100–200°C. Substrate temperature increase to 300°C results in the formation of nanocomposite films consisting of graphite nanocrystals embedded in an amorphous carbon matrix. The presence of double- and triple-charged C60 ions with an energy of 14 and 21 keV respectively in the beam results in a decrease in the temperature of formation of the nanocomposite to 200°C. As the result of analysis of the data collected from various sample depths by X-ray photoelectron spectroscopy and Auger-electron spectroscopy, it is found that the sp3/sp2 ratio in the surface layers is higher than in the sample bulk, both in the case of a monoenergetic 7 keV beam, and in the presence of multicharged high-energy ions in the beam. If high-energy ions are present in the beam, then the sp3/sp2 ratio is higher and depends, in a complex way, on the temperature of deposition. The maximum amount of sp3 bonds in the surface layers is found at a temperature of deposition of 350°C and is equal to 88%. The water drop contact angle for this film is 96°, which is similar to the contact angle of the diamond surface.

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Funding

The work is supported by Russian Foundation for Basic Research (project no. 19-58-51016), and also partially in the context of the State assignments of Institute of Problems of Chemical Physics, Russian Academy of Sciences (state registration number AAAA-A19-119061890019-5, thematic card 0089-2019-007), and Institute of Problems of Microelectronics Technology, Russian Academy of Sciences (no. 075-00355-21-00) with the use of equipment of Analytic Research Equipment Sharing Center of the Institute of Problems of Chemical Physics, Russian Academy of Sciences, and Research Equipment Sharing Center of Chernogolovka Scientific Center, Russian Academy of Sciences.

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Authors and Affiliations

  1. Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Russia

    A. A. Belmesov, G. V. Nechaev, V. E. Pukha & E. N. Kabachkov

  2. Institute of Problems of Microelectronics Technology, Russian Academy of Sciences, 142432, Chernogolovka, Russia

    I. I. Khodos

  3. Peter the Great St. Petersburg Polytechnic University, 195251, St. Petersburg, Russia

    P. A. Karaseov

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  1. A. A. Belmesov
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  2. G. V. Nechaev
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  3. V. E. Pukha
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  4. E. N. Kabachkov
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  5. I. I. Khodos
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  6. P. A. Karaseov
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Correspondence to A. A. Belmesov.

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Translated by G. Levina

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Belmesov, A.A., Nechaev, G.V., Pukha, V.E. et al. Influence of High-Energy C60 Ions on the Structure and Bonds of Carbon Coatings. J. Surf. Investig. 15 (Suppl 1), S112–S119 (2021). https://doi.org/10.1134/S1027451022020240

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  • DOI: https://doi.org/10.1134/S1027451022020240

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