Abstract—
The influence of the parameters of a scanning electron microscope (SEM) on its calibration using test objects with a trapezoidal profile and large inclination angles of the side walls is studied. The focusing of the SEM probe and the energy of its electrons affect SEM calibration in the modes of collecting secondary slow electrons and backscattered electrons. It is shown that the microscope can be calibrated only in the low-voltage mode of operation with an energy of primary electrons less than 2 keV and in the mode of collecting secondary slow electrons with an energy of primary electrons more than 10 keV. A model of the formation of microscope signals in these energy ranges is presented. The influence of contamination on the lifetime of the test object and on the calibration accuracy of the scanning electron microscope is considered.
Similar content being viewed by others
REFERENCES
L. Reimer, Scanning Electron Microscopy: Physics of Image Formation and Microanalysis (Springer, New York, 1998).
M. T. Postek and A. E. Vladar, “Critical Dimension Metrology and the Scanning Electron Microscope,” in Handbook of Silicon Semiconductor Metrology, Ed. by A. C. Diebold (Marcel Dekker, New York, 2001), p. 295.
Yu. A. Novikov and A. V. Rakov, Meas. Tech. 42 (1), 20 (1999).
T. Hatsuzawa, K. Toyoda, and Y. Tanimura, Rev. Sci. Instrum. 61 (3), 975 (1990).
V. Gavrilenko, Yu. Novikov, A. Rakov, and P. Todua, Nanoindustriya, No. 4, 36 (2009). [in Russian]
V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE 7405, 740504 (2009). https://doi.org/10.1117/12.826164
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 7 (3), 497 (2013). https://doi.org/10.1134/S1027451013030105
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 7 (4), 802 (2013). https://doi.org/10.1134/S1027451013040368
Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov, A. M. Prokhorov, and A. V. Rakov, Russ. Microelectron. 31 (4), 207 (2002).
Yu. A. Novikov, V. P. Gavrilenko, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua, Proc. SPIE 6648, 66480 (2007). https://doi.org/10.1117/12.733134
M. A. Danilova, V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua, Meas. Tech. 51 (9), 998 (2008). https://doi.org/10.1007/s11018-008-9152-8
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 11 (6), 1260 (2017). https://doi.org/10.1134/S1027451017060179
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 12 (6), 1224 (2018). https://doi.org/10.1134/S1027451018050658
Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov, and A. V. Rakov, Russ. Microelectron. 33 (6), 342 (2004).
V. A. Kal’nov, Yu. A. Novikov, and A. A. Orlikovsky, Russ. Microelectron. 41 (6), 347 (2012). https://doi.org/10.1134/S1063739712020072
V. P. Gavrilenko, M. N. Filippov, Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE 7378, 737812 (2009). https://doi.org/10.1117/12.821760
V. P. Gavrilenko, E. N. Lesnovsky, Yu. A. Novikov, A. V. Rakov, P. A. Todua, and M. N. Filippov, Bull. Russ. Acad. Sci.: Phys. 73 (4), 433 (2009). https://doi.org/10.3103/S1062873809040017
M. A. Danilova, V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua, Meas. Tech. 51 (8), 839 (2008). https://doi.org/10.1007/s11018-008-9135-9
V. P. Gavrilenko, V. A. Kalnov, Yu. A. Novikov, A. A. Orlikovsky, A. V. Rakov, P. A. Todua, K. A. Valiev, and E. N. Zhikharev, Proc. SPIE 7272, 727227 (2009). https://doi.org/10.1117/12.814062
P. A. Todua, V. P. Gavrilenko, Yu. A. Novikov, and A. V. Rakov, Proc. SPIE 7042, 704209 (2008). https://doi.org/10.1117/12.794926
Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 8 (6), 1244 (2014). https://doi.org/10.1134/S1027451014060123
Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 9 (3), 604 (2015). https://doi.org/10.1134/S1027451015030325
Yu. A. Novikov, Russ. Microelectron. 43 (4), 258 (2014). https://doi.org/10.1134/S1063739714040076
Yu. A. Novikov, Russ. Microelectron. 43 (6), 427 (2014). https://doi.org/10.1134/S1063739714060079
Yu. A. Novikov, Russ. Microelectron. 44 (4), 269 (2015). https://doi.org/10.1134/S1063739715030075
W. Haessler-Grohne and H. Bosse, Meas. Sci. Technol. 9, 1120 (1998).
Ch. P. Volk, E. S. Gornev, V. V. Kalendin, V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, H. Bosse, and C. G. Frase, in Proceedings of the 12th Russian Symposium on Scanning Electron Microscopy and Analytical Methods to Study Solids (Chernogolovka, 2001), p. 128 [in Russian].
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 14 (3), 609 (2020). https://doi.org/10.1134/S1027451020030106
Yu. A. Novikov, S. A. Darnel, M. N. Filippov, V. B. Mityukhlyaev, A. V. Rakov, and P. A. Todua, Proc. SPIE 7025, 702511 (2008). https://doi.org/10.1117/12.802428
Yu. A. Novikov, A. V. Rakov, and I. Yu. Stekolin, Meas. Tech. 39 (12), 1204 (1996). https://doi.org/10.1007/BF02375406
Yu. A. Novikov, Russ. Microelectron. 43 (5), 361 (2014). https://doi.org/10.1134/S1063739714050047
Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua, Meas. Sci. Technol. 18, 367 (2007). https://doi.org/10.1088/0957-0233/18/2/S07
Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. I. Plotnikov, A. V. Rakov, and P. A. Todua, Linear measurements in micrometer and nanometer ranges for microelectronics and nanotechnology. Moscow: Nauka, 2006, P. 77. (Proc. IOFAN, Vol. 62). [in Russian].
V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE 7042, 70420 (2008). https://doi.org/10.1117/12.794891
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 8 (6), 1252 (2014). https://doi.org/10.1134/S1027451014060135
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 9 (5), 1060 (2015). https://doi.org/10.1134/S1027451015050389
Yu. A. Novikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 14 (6), 1387 (2020).https://doi.org/10.1134/S1027451020060397
ACKNOWLEDGMENTS
I am grateful to A. V. Rakov and V. B. Mityukhlyaev for their participation in the experiments and helpful remarks.
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated by I. Obrezanova
Rights and permissions
About this article
Cite this article
Novikov, Y.A. Calibration of a Scanning Electron Microscope: 1. Selection of the SEM Parameters. J. Surf. Investig. 15, 502–512 (2021). https://doi.org/10.1134/S1027451021020294
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451021020294