Abstract
This work presents the results of the X-ray photoelectron spectroscopy investigation of carbon films obtained by ion-plasma deposition at various plasma compositions. The detailed analysis of X-ray photoelectron spectra makes it possible to determine the structure of the deposited films and the influence of the presence of nitrogen and hydrogen in the plasma on the structure. Diamond-like films are obtained in pure argon plasma. The addition of nitrogen leads to a dramatic increase in the graphite-like phase while the addition of hydrogen corresponds to the formation of carbon chains.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
REFERENCES
K. E. Avjyan, L. A. Matevosyan, K. S. Ohanyan, and L. G. Petrosyan, Instrum. Exp. Tech., 59 (1), 60 (2016).
S. Tikhomirov and T. Kimstach, Analitika 1 (1), 28 (2011).
O. A. Streletskii, I. P. Ivanenko, V. V. Khvostov, N. F. Savchenko, O. Yu. Nishchak, and A. F. Aleksandrov, Phys. Solid State 58, 2119 (2016).
A. C. Ferrari and J. Robertson, Phil. Trans. R. Soc. Lond. A 362, 1098 (2004).
M. Yoshikawa, N. Nagai, M. Matsuki, H. Fukuda, G. Katagiri, H. Ishida, and A. Ishitani, Phys. Rev. 46, 7169 (1992).
A. Milani, A. Lucotti, V. Russo, M. Tommasini, F. Cataldo, A. Li. Bassi, and C. S. Casari, J. Phys. Chem. C 115, 26 (2011).
J. T. Titantah and D. Lamoen, Carbon 43, 1311 (2005).
R. Haerle, E. Riedo, A. Pasquarello, and A. Baldereschi, Phys. Rev. 65, 045101 (2001).
A. P. Dementjev, A. de Graaf, M. C. M. van de Sanden, K. I. Maslakova, A. V. Naumkina, and A. A. Serova, Diamond Relat. Mater. 9, 1904 (2000).
A. Nikitin, X. Li, Z. Zhang, H. Ogasawara, H. Dai, and A. Nilsson, Nano Lett. 8, 1021 (2008).
J. J. Ritsko, E. J. Mele, A. J. Heeger, A. G. Mac Diarmid, and I.M. Ozak, Phys. Rev. Lett. 44, 1351 (1980).
J. J. Ritsko, G. Crecelius, and J. Fink, Phys. Rev. 27, 4902 (1983).
Yu. P. Kudryavtsev, S. E. Evsyukov, V. G. Babaev, M. B. Guseva, V. V. Khvostov, and L. M. Krechko, Carbon 30 (2), 213 (1992).
E. M. Baitinger, E. A. Belenkov, M. M. Brzhezinskaya, and V. A. Greshnyakov, Phys. Solid State 54 (8), 1715 (2012).
L. Zajickova, D. Franta, and D. Necas, Thin Solid Films 519, 4299 (2011).
O. Stephan, D. Taverna, M. Kociak, et al., Phys. Rev. 66, 155422 (2002).
V. G. Babaev, M. B. Guseva, N. D. Novikov, and V. V. Khvostov, in Polyynes: Synthesis, Properties, and Applications, Ed. by F. Cataldo. (CRC Press, 2005), p. 219.
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated by D. Churochkin
Rights and permissions
About this article
Cite this article
Nishchak, O.Y., Savchenko, N.F., Streletsky, O.A. et al. Electron Spectroscopy of Thin Nanocarbon Films. J. Surf. Investig. 13, 390–394 (2019). https://doi.org/10.1134/S1027451019030157
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451019030157