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Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences

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Abstract

Several optical methods for measuring the shape of a mirror surface are presented. Their advantages, disadvantages, and fields of applications are indicated. The results of measurements conducted for the same spherical mirror with the use of these methods are given. Good agreement between the results is obtained.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    A. A. Akhsakhalyan, A. D. Akhsakhalyan, D. G. Volgunov, M. V. Zorina, M. N. Toropov & N. I. Chkhalo

Authors
  1. A. A. Akhsakhalyan
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  2. A. D. Akhsakhalyan
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  3. D. G. Volgunov
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  4. M. V. Zorina
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  5. M. N. Toropov
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  6. N. I. Chkhalo
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Corresponding author

Correspondence to A. A. Akhsakhalyan.

Additional information

Original Russian Text © A.A. Akhsakhalyan, A.D. Akhsakhalyan, D.G. Volgunov, M.V. Zorina, M.N. Toropov, N.I. Chkhalo, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 7, pp. 93–96.

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Akhsakhalyan, A.A., Akhsakhalyan, A.D., Volgunov, D.G. et al. Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences. J. Surf. Investig. 9, 741–744 (2015). https://doi.org/10.1134/S1027451015040035

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  • DOI: https://doi.org/10.1134/S1027451015040035

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