Abstract
The principles of the construction of a virtual scanning electron microscope (SEM) are discussed. It is demonstrated that such a microscope cannot be created using a imitator of real SEM operation. It is concluded that a virtual SEM must be developed using a simulator of information similar to that which is obtained by means of a real microscope. The possibilities of reducing the time required to generate micro- and nanostructure images to values comparable with the imaging duration of real SEMs are analyzed.
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Novikov, Y.A. Virtual scanning electron microscope: 2. Principles of instrument construction. J. Surf. Investig. 9, 604–611 (2015). https://doi.org/10.1134/S1027451015030325
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DOI: https://doi.org/10.1134/S1027451015030325