Abstract
The theory of the formation of the energy spectra of electrons and light ions reflected form a solid surface is constructed. It is shown that methods based on the numerical solution of boundary-value problems for the transport equation are the most effective. The boundary-value problem is solved based on the invariant embedding method. Equations for the reflection coefficients R k (x, n, n 0), describing the flux of atomic particles reflected in the direction n and having experienced k events of elastic scattering are obtained. The obtained results are compared with experimental data, the results of simulation using the Monte Carlo method, and the calculations of other authors.
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Original Russian Text © V.P. Afanas’ev, P.S. Kaplya, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 7, pp. 66–71.
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Afanas’ev, V.P., Kaplya, P.S. Theory of the formation of the energy spectra of reflected charged particles. J. Surf. Investig. 9, 715–720 (2015). https://doi.org/10.1134/S1027451015020238
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DOI: https://doi.org/10.1134/S1027451015020238