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Structure and phase composition of niobium-copper deposited films

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Abstract

Solid solutions of Nb + 9 at % of Cu and Cu + 12 at % of Nb are obtained by ion-plasma sputtering and the codeposition of ultrafine particles of niobium (less than 11 nm) and copper (less than 1.7 nm), which is confirmation of the theory of the thermal-fluctuation melting of small particles and the coalescence of quasi-liquid clusters of subcritical size. The film coating consists of an amorphous phase in the concentration range 22.7–80.2 at % of Cu. Upon the annealing of amorphous systems of all compositions at 600–850°C, a new phase, presumably, of an orthorhombic system is found and its approximate lattice parameters are determined. At specific dimensional ratios of ultrafine particles of niobium and copper, nanoclusters with an ordered superlattice are formed. The appearance of a superstructure is a result of the size factor.

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Correspondence to V. N. Volodin.

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Original Russian Text © V.N. Volodin, Yu.Zh. Tuleushev, E.A. Zhakanbaev, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 2, pp. 75–80.

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Volodin, V.N., Tuleushev, Y.Z. & Zhakanbaev, E.A. Structure and phase composition of niobium-copper deposited films. J. Surf. Investig. 9, 178–183 (2015). https://doi.org/10.1134/S1027451015010371

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  • DOI: https://doi.org/10.1134/S1027451015010371

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