Skip to main content
Log in

Structure and phase composition of deposited tantalum–carbon films

  • Structure, Phase Transformations, and Diffusion
  • Published:
The Physics of Metals and Metallography Aims and scope Submit manuscript

Abstract

Ion plasma sputtering and the subsequent codeposition of ultrafine tantalum and carbon particles were used to prepare coatings with 4.6–71.5 at % C. Structural studies of the coatings showed the existence of carbon solid solutions in β Ta at carbon contents to 4.6 at %, carbon solid solutions in α Ta at carbon contents of 4.6–10.3 at %, and direct synthesis of TaC at carbon contents of 44.7–71.5 at %. During heat treatments to 700°C, the substantial concentration widening of regions of the existence of Ta2C and TaC was found. The lattice parameters of hexagonal Ta2C and fcc TaC carbides were determined for composition ranges of the existence of phases during heating to 700°C. Upon heating above 600°C, the progressive transition of quasiamorphous Ta2C carbide into the crystalline Ta2C carbide was found to take place. The possibility of applying the direct synthesis of TaC carbide in engineering was noted.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. A. I. Gusev and A. A. Rempel’, Nonstoichiometry, Disorder, and Order in Solids (Ural. Otd. Ross. Akad. Nauk, Ekaterinburg, 2001) [in Russian].

    Book  Google Scholar 

  2. O. M. Barabash and Yu. N. Koval’, Crystal Structure of Metals and Alloys (Naukova Dumka, Kiev, 1986) [in Russian].

    Google Scholar 

  3. Phase Diagrams of Binary Metal Systems, Ed. by N. P. Lyakishev (Mashinostroenie, Moscow, 1996), Vol. 1 [in Russian].

  4. A. I. Gusev and N. V. Lipatnikov, “Ordering in the Ta4C(3–x) carbide phase,” JETP Lett. 82, 287–291 (2005).

    Article  Google Scholar 

  5. N. V. Lipatnikov and A. I. Gusev, “Atomic-vacancy ordering in the carbide phase Ta4C(3–x),” Phys. Solid. State 48, 1634–1645 (2006).

    Article  Google Scholar 

  6. A. I. Gusev, A. S. Kurlov, and V. N. Lipatnikov, “Atomic and vacancy ordering in carbide Ta4C(3–x) (0.28 < x < 0.40) and phase equilibria in the Ta–C system,” J. Solid State Chem. 180, 3234–3246 (2007).

    Article  Google Scholar 

  7. V. N. Volodin, Yu. Zh. Tuleushev, and E. A. Zhakanbaev, “Structure and phase composition of Nb–C deposited films,” Phys. Met. Metallogr. 114, 395–399 (2013).

    Article  Google Scholar 

  8. V. P. Skripov and V. P. Koverda, Spontaneous Crystallization of Supercooled Liquids (Nauka, Moscow, 1984).

    Google Scholar 

  9. E. Roduner, Size Effects in Nanomaterials (Tekhnosfera, Moscow, 2010) [in Russian].

    Google Scholar 

  10. Yu. Zh. Tuleushev, V. N. Volodin, and E. A. Zhakanbaev, “Tantalum–cadmium film coatings: Preparation, phase composition, and structure,” Phys. Met. Metallogr. 116, 56–62 (2015).

    Article  Google Scholar 

  11. V. N. Volodin, Yu. Zh. Tuleushev, K. V. Tsai, and E. A. Zhakanbaev, “New Mo3Pb phase with A15 structure formed in solid solutions of film molybdenum–lead system,” Phys. Met. Metallogr. 115, 500–506 (2014).

    Article  Google Scholar 

  12. V. N. Volodin, Yu. Zh. Tuleushev, and E. A. Zhakanbaev, “Structure of sputter-deposited films of ß-tantalum–aluminum alloys,” Phys. Met. Metallogr. 114, 935–939 (2013).

    Article  Google Scholar 

  13. S. Krumm, WinFit! V1.2: Package for Complete Profile- Analysis of X–Ray Reflections (Profile Fitting, Size, Strain) 1995. ftp://xraygeoluni-erlangen. de/software/windows/winfit/winfitzip

    Google Scholar 

  14. E. V. Shelekhov and T. A. Sviridova, “Programs for X-ray analysis of polycrystals,” Metal Sci. Heat Treat. 42, 309–313 (2000).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Yu. Zh. Tuleushev.

Additional information

Original Russian Text © Yu.Zh. Tuleushev, V.N. Volodin, E.A. Zhakanbaev, B. Alimzhan, 2016, published in Fizika Metallov i Metallovedenie, 2016, Vol. 117, No. 8, pp. 817–822.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tuleushev, Y.Z., Volodin, V.N., Zhakanbaev, E.A. et al. Structure and phase composition of deposited tantalum–carbon films. Phys. Metals Metallogr. 117, 789–794 (2016). https://doi.org/10.1134/S0031918X16060120

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0031918X16060120

Keywords

Navigation