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Numerical Simulation of GaAs/AlOx High Index Contrast Subwavelength Gratings for GaAs-Based Vertical Cavity Surface Emitting Lasers

  • OPTICS AND LASER PHYSICS
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A GaAs/AlOx high index contrast subwavelength grating with TE polarization is presented for the GaAs-based vertical cavity surface emitting laser (VCSEL). The rigorous coupled wave analysis (RCWA) method is employed to simulate the dependence between its reflection characteristics and grating parameters. Especially, the effects of the stress buffer layer, shape errors, and angle of incidence on refractivity are also analyzed in detail. The high index contrast subwavelength grating has a large reflection bandwidth up to 97 nm with good polarization selectivity, and exhibits large tolerance in preparation, which makes it easier to integrate with the VCSEL. What’s more, its sensitivity to angle of incidences facilitates the single-mode VCSELs’ implement.

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Authors and Affiliations

  1. National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology, 130022, Changchun, People’s Republic of China

    Y. Luo & Y.-Q. Hao

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  1. Y. Luo
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  2. Y.-Q. Hao
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Correspondence to Y.-Q. Hao.

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Luo, Y., Hao, YQ. Numerical Simulation of GaAs/AlOx High Index Contrast Subwavelength Gratings for GaAs-Based Vertical Cavity Surface Emitting Lasers. Jetp Lett. 116, 288–292 (2022). https://doi.org/10.1134/S0021364022601154

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  • DOI: https://doi.org/10.1134/S0021364022601154

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