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Fabrication of submicron structures by three-dimensional laser lithography

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Abstract

As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

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Authors and Affiliations

  1. ITMO University, St. Petersburg, 197101, Russia

    I. I. Shishkin, M. V. Rybin, K. B. Samusev, M. F. Limonov, Yu. S. Kivshar’ & P. A. Belov

  2. Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    I. I. Shishkin, M. V. Rybin, K. B. Samusev & M. F. Limonov

  3. Laser Zentrum Hannover e.V., D-30419, Hannover, Germany

    R. V. Kiyan & B. N. Chichkov

  4. Nonlinear Physics Center, Australian National University, ACT, 0200, Canberra, Australia

    Yu. S. Kivshar’

Authors
  1. I. I. Shishkin
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  2. M. V. Rybin
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  3. K. B. Samusev
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  4. M. F. Limonov
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  5. R. V. Kiyan
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  6. B. N. Chichkov
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  7. Yu. S. Kivshar’
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  8. P. A. Belov
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Corresponding author

Correspondence to M. V. Rybin.

Additional information

Original Russian Text © I.I. Shishkin, M.V. Rybin, K.B. Samusev, M.F. Limonov, R.V. Kiyan, B.N. Chichkov, Yu.S. Kivshar’, P.A. Belov, 2014, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2014, Vol. 99, No. 9, pp. 614–617.

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Shishkin, I.I., Rybin, M.V., Samusev, K.B. et al. Fabrication of submicron structures by three-dimensional laser lithography. Jetp Lett. 99, 531–534 (2014). https://doi.org/10.1134/S0021364014090112

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  • DOI: https://doi.org/10.1134/S0021364014090112

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