Skip to main content
Log in

Mo/Ni and Ni/Ta–W–N/Ni thin-film contact layers for (Bi,Sb)2Te3-based intermediate-temperature thermoelectric elements

  • Published:
Inorganic Materials Aims and scope

Abstract

We have examined the possibility of utilizing thin-film contact layers for producing reliable Ohmic contacts to proposed intermediate-temperature (Bi,Sb)2Te3-based thermoelectric materials with improved thermoelectric properties, which allow the working temperature range to be extended to 600 K. Three contact configurations have been produced by ion-plasma magnetron sputtering: a single Ni layer, Mo/Ni bilayer, and Ni/Ta–W–N/Ni three-layer system. It has been shown that reliable contacts can be produced using Mo/Ni and Ni/Ta–W–N/Ni layers, which prevent interdiffusion between the materials to be joined and ensure good adhesion to the thermoelectric element.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

We’re sorry, something doesn't seem to be working properly.

Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.

References

  1. Sherchenkov, A.A., Shtern, Yu.I., Mironov, R.E., Shtern, M.Yu., and Rogachev, M.S., Current state of thermoelectric material science and the search for new effective materials, Nanotechnol. Russ., 2015, vol. 10, nos. 11–12, pp. 827–840.

    Article  Google Scholar 

  2. Snyder, G.J. and Toberer, E.S., Complex thermoelectric materials, Nat. Mater., 2008, vol. 7, pp. 105–114.

    Article  CAS  Google Scholar 

  3. Zhao, L.D., Dravid, V.P., and Kanatzidis, M.G., The panoscopic approach to high performance thermoelectric, Energy Environ. Sci., 2014, vol. 7, no. 1, pp. 256–258.

    Article  Google Scholar 

  4. Minnich, A.J., Dresselhaus, M.S., Ren, Z.F., and Chen, G., Bulk nanostructured thermoelectric materials: current research and future prospects, Energy Environ. Sci., 2009, vol. 2, no. 5, pp. 466–479.

    Article  CAS  Google Scholar 

  5. Baranowski, L.L., Snyder, G.J., and Toberer, E.S., Concentrated solar thermoelectric generators, Energy Environ. Sci., 2012, vol. 5, pp. 9055–9067.

    Article  CAS  Google Scholar 

  6. LaLonde, A.D., Pei, Y.Z., and Snyder, G.J., Reevaluation of PbTe1 - x Ix as high performance n-type thermoelectric material, Energy Environ. Sci., 2011, vol. 4, no. 6, pp. 2090–2096.

    Article  CAS  Google Scholar 

  7. He, J.Q., Kanatzidis, M.G., and Dravid, V.P., High performance bulk thermoelectric via a panoscopic approach, Mater. Today, 2013, vol. 16, no. 5, pp. 167–170.

    Article  Google Scholar 

  8. Shtern, Yu.I. and Bozhenar’, D.A., Fabrication of high-adhesion-strength Ohmic contacts to thermoelectric elements, Izv. Vyssh. Uchebn. Zaved. Elektron., 2001, no. 1, pp. 34–40.

    Google Scholar 

  9. Kim, H.S., Kim, B.O., and Seo, J.H., A study on the adhesion properties of reactive sputtered molybdenum thin films with nitrogen gas on polyimide substrate as a Cu barrier layer, J. Nanosci. Nanotechnol., 2015, vol. 15, no. 11, pp. 8743–8748.

    Article  CAS  Google Scholar 

  10. Poate, J.M., Tu, K.N., and Mayer, J.W., Thin Films—Interdiffusion and Reaction, New York: Wiley, 1978.

    Google Scholar 

  11. Gromov, D.G., Mochalov, A.I., Klimovitskiy, A.G., Sulimin, A.D., and Redichev, E.N., Approaches to diffusion barrier creation and trench filling for copper interconnection formation, Appl. Phys. A, 2005, vol. 81, no. 7, pp. 1337–1343.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Yu. I. Shtern.

Additional information

Original Russian Text © D.G. Gromov, Yu.I. Shtern, M.S. Rogachev, A.S. Shulyat’ev, E.P. Kirilenko, M.Yu. Shtern, V.A. Fedorov, M.S. Mikhailova, 2016, published in Neorganicheskie Materialy, 2016, Vol. 52, No. 11, pp. 1206–1210.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Gromov, D.G., Shtern, Y.I., Rogachev, M.S. et al. Mo/Ni and Ni/Ta–W–N/Ni thin-film contact layers for (Bi,Sb)2Te3-based intermediate-temperature thermoelectric elements. Inorg Mater 52, 1132–1136 (2016). https://doi.org/10.1134/S0020168516110030

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020168516110030

Keywords

Navigation