Abstract
We have examined the possibility of utilizing thin-film contact layers for producing reliable Ohmic contacts to proposed intermediate-temperature (Bi,Sb)2Te3-based thermoelectric materials with improved thermoelectric properties, which allow the working temperature range to be extended to 600 K. Three contact configurations have been produced by ion-plasma magnetron sputtering: a single Ni layer, Mo/Ni bilayer, and Ni/Ta–W–N/Ni three-layer system. It has been shown that reliable contacts can be produced using Mo/Ni and Ni/Ta–W–N/Ni layers, which prevent interdiffusion between the materials to be joined and ensure good adhesion to the thermoelectric element.
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References
Sherchenkov, A.A., Shtern, Yu.I., Mironov, R.E., Shtern, M.Yu., and Rogachev, M.S., Current state of thermoelectric material science and the search for new effective materials, Nanotechnol. Russ., 2015, vol. 10, nos. 11–12, pp. 827–840.
Snyder, G.J. and Toberer, E.S., Complex thermoelectric materials, Nat. Mater., 2008, vol. 7, pp. 105–114.
Zhao, L.D., Dravid, V.P., and Kanatzidis, M.G., The panoscopic approach to high performance thermoelectric, Energy Environ. Sci., 2014, vol. 7, no. 1, pp. 256–258.
Minnich, A.J., Dresselhaus, M.S., Ren, Z.F., and Chen, G., Bulk nanostructured thermoelectric materials: current research and future prospects, Energy Environ. Sci., 2009, vol. 2, no. 5, pp. 466–479.
Baranowski, L.L., Snyder, G.J., and Toberer, E.S., Concentrated solar thermoelectric generators, Energy Environ. Sci., 2012, vol. 5, pp. 9055–9067.
LaLonde, A.D., Pei, Y.Z., and Snyder, G.J., Reevaluation of PbTe1 - x Ix as high performance n-type thermoelectric material, Energy Environ. Sci., 2011, vol. 4, no. 6, pp. 2090–2096.
He, J.Q., Kanatzidis, M.G., and Dravid, V.P., High performance bulk thermoelectric via a panoscopic approach, Mater. Today, 2013, vol. 16, no. 5, pp. 167–170.
Shtern, Yu.I. and Bozhenar’, D.A., Fabrication of high-adhesion-strength Ohmic contacts to thermoelectric elements, Izv. Vyssh. Uchebn. Zaved. Elektron., 2001, no. 1, pp. 34–40.
Kim, H.S., Kim, B.O., and Seo, J.H., A study on the adhesion properties of reactive sputtered molybdenum thin films with nitrogen gas on polyimide substrate as a Cu barrier layer, J. Nanosci. Nanotechnol., 2015, vol. 15, no. 11, pp. 8743–8748.
Poate, J.M., Tu, K.N., and Mayer, J.W., Thin Films—Interdiffusion and Reaction, New York: Wiley, 1978.
Gromov, D.G., Mochalov, A.I., Klimovitskiy, A.G., Sulimin, A.D., and Redichev, E.N., Approaches to diffusion barrier creation and trench filling for copper interconnection formation, Appl. Phys. A, 2005, vol. 81, no. 7, pp. 1337–1343.
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Original Russian Text © D.G. Gromov, Yu.I. Shtern, M.S. Rogachev, A.S. Shulyat’ev, E.P. Kirilenko, M.Yu. Shtern, V.A. Fedorov, M.S. Mikhailova, 2016, published in Neorganicheskie Materialy, 2016, Vol. 52, No. 11, pp. 1206–1210.
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Gromov, D.G., Shtern, Y.I., Rogachev, M.S. et al. Mo/Ni and Ni/Ta–W–N/Ni thin-film contact layers for (Bi,Sb)2Te3-based intermediate-temperature thermoelectric elements. Inorg Mater 52, 1132–1136 (2016). https://doi.org/10.1134/S0020168516110030
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DOI: https://doi.org/10.1134/S0020168516110030