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In situ TEM observation of reaction of Ti/Al multilayers

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Abstract

The Ti/Al multilayers of nominal periods = 50 nm and = 200 nm were deposited using double target magnetron system equipped with rotating substrate holder. The in situ TEM experiments were aimed at explaining DSC measured exothermic effects through phase transformations taking place during heating of the multilayers with small and large period. Thin foils for these examinations were cut with FIB. The performed experiments showed that the as deposited multilayers are characterized by presence of coarse pseudo-columnar crystallites built of alternating hex-Ti and fcc-Al. The intermixed region at the internal interfaces extends up to 10 nm, i.e. the areas filled with mutually alloyed material starts to dominate over those of pure metals for multilayers of γ < 30 nm. The DSC measurements indicated that in both multilayers their reaction are split to two stages, but those in the small period take place at much lower temperature range, than that in the large period one. Basing on the in situ TEM heating following reaction paths were noted

small period (γ - 50 nm); fcc-Al + hcp-Ti → fcc-Al + hcp-Ti + t-Al3Ti → γ-TiAl

large period(γ-200nm); fcc-Al + hcp-Ti → fcc-Al + hcp-Ti + c-Al3Ti

→ fcc-Al + hcp-Ti + t-Al3Ti → γ-TiAl + a2-Ti3Al

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References

  1. T. Namazu, H. Takemoto, H. Fujita, Y. Nagai, S. Inoue, Self-propagating explosive reactions in nanostructured Al/Ni multilayer films as a localized heat process technique for MEMS, in: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, Turkey, Istanbul, (2006) 286–289.

    Chapter  Google Scholar 

  2. A. Gavens, D. Van Heerden, A. Mann, M. Reiss, T. Weihs, Effect of intermixing on self-propagating exothermic reactions in Al/Ni nano-laminate foils, Journal of Applied Physics 87 (2000) 1255.

    Article  Google Scholar 

  3. X. Qiu, J. Wang, Experimental evidence of two-stage formation of Al3Ni in reactive Ni/Al multilayer foils, Scripta Materialia 56 (2007) 1055–1058.

    Article  Google Scholar 

  4. A.S. Ramos, M.T. Vieira, J. Morgiel, J. Grzonka, S. Simőes, M.F. Vieira, Production of intermetallic compounds from Ti/Al and Ni/Al multilayer thin films - a comparative study, Journal of Alloys and Compounds 484 (2009) 335–340.

    Article  Google Scholar 

  5. K.W. Marszalek, J. Stepien, R. Mania, Computer controlled system for the magnetron sputtering deposition of the metallic multilayers, International Journal of Electronics and Telecommunications 60 (4) (2014) 291–298.

    Article  Google Scholar 

  6. A. Edelstein, R. Everett, G. Richardson, S. Qadri, E. Altman, J. Foley, J.H. Perepezko, Intermetallic phase formation during annealing of Al/Ni multilayers, Journal of Applied Physics 76 (12) (1994) 7850.

    Article  Google Scholar 

  7. D. Shechtman, D. Van Heerden, D. Josell, FCC titanium in Ti- Al multilayers, Materials Letters 20 (1994) 329–334.

    Article  Google Scholar 

  8. R. Banerjee, X.D. Zhang, S.A. Dregia, H.L. Fraser, Phase stability in Al/Ti multilayers, Acta Materialia 47 (4) (1999) 1153–1161.

    Article  Google Scholar 

  9. Q. Wei, A. Misra, TEM study of microstructure and crystallographic orientation relationship in V/Ag multilayers, Acta Materialia 58 (2010) 4871–4882.

    Article  Google Scholar 

  10. A.S. Ramos, R. Calinas, M.T. Vieira, The formation of (-TiAl from Ti/Al multilayers with different periods, Surface and Coatings Technology 200 (2006) 6196–6200.

    Article  Google Scholar 

  11. A. Genc, Phase Stability in Metallic Multilayers, (Ph. D thesis), Ohio State University, 2008.

    Google Scholar 

  12. J.G. Luo, V.L. Acoff, Interfacial reactions of titanium and aluminium during diffusion welding, Welding Research Supplement 2000 (September) (2000) 239–243.

    Google Scholar 

  13. R.E. Reed-Hill, R. Abbaschian, Physical Metallurgy Principles, PWS-KENT, Boston, MA, 1992, pp. 360–401.

    Google Scholar 

  14. Y. Mishin, C. Herzig, Diffusion in the Ti-Al system, Acta Materialia 48 (2000) 589–623.

    Article  Google Scholar 

  15. J. Rusing, C. Herzig, Concentration and temperature-dependence of titanium self-diffusion and interdiffusion in the intermetallic phase Ti3Al, Intermetallics 4 (8) (1996) 647–657.

    Article  Google Scholar 

  16. C. Herzig, T. Przeorski, Y. Mishin, Self-diffusion in (-TiAl: an experimental study and atomistic calculations, Intermetallics 7 (1999) 389–404.

    Article  Google Scholar 

  17. A.S. Ramos, M.T. Vieira, Kinetics of the thin films transformation Ti/Al multilayer → (γ-TiAl), Surface and Coatings Technology 200 (2005) 326–329.

    Article  Google Scholar 

  18. E. Illekova, J.C. Gachon, A. Rogachev, H. Grigoryan, J.G. Schuster, A. Nosyrev, P. Tsygankov, Kinetics of intermetallic phase formation in the Ti/Al multilayers, Thermochimica Acta 469 (2008) 77–85.

    Article  Google Scholar 

  19. G. Lucadamo, K. Barmak, C. Lavoie, C. Cabral Jr., G. Michaelsen, Metastable and equilibrium phase formation in sputter-deposited Ti/Al multilayer thin films, Journal of Applied Physics 91 (2002) 9575–9583.

    Article  Google Scholar 

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Correspondence to Jerzy Morgiel.

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Morgiel, J., Marszałek, K., Pomorska, M. et al. In situ TEM observation of reaction of Ti/Al multilayers. Archiv.Civ.Mech.Eng 17, 188–198 (2017). https://doi.org/10.1016/j.acme.2016.09.008

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  • DOI: https://doi.org/10.1016/j.acme.2016.09.008

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