Skip to main content
Log in

A Non-parametric Gradient-Based Shape Optimization Approach for Solving Inverse Problems in Directed Self-Assembly of Block Copolymers

  • Original Paper
  • Published:
Communications on Applied Mathematics and Computation Aims and scope Submit manuscript

Abstract

We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts. Specifically, we model polymer self-assembly using the self-consistent field theory and derive, in a non-parametric setting, the sensitivity of the dissimilarity between the desired and the actual morphologies to arbitrary perturbations in the guiding pattern shape. The sensitivity is then used for the optimization of the confining pattern shapes such that the dissimilarity between the desired and the actual morphologies is minimized. The efficiency and robustness of the proposed gradient-based algorithm are demonstrated in a number of examples related to templating vertical interconnect accesses (VIA).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

Data Availability

Data sets generated during the current study are available from the corresponding author on reasonable request.

References

  1. Arias, V., Bochkov, D., Gibou, F.: Poisson equations in irregular domains with Robin boundary conditions-solver with second-order accurate gradients. J. Comput. Phys. 365, 1–6 (2018)

    Article  MathSciNet  Google Scholar 

  2. Bayat, E., Egan, R., Bochkov, D., Sauret, A., Gibou, F.: A sharp numerical method for the simulation of Stefan problems with convective effects. J. Comput. Phys. 471, 111627 (2022)

    Article  MathSciNet  Google Scholar 

  3. Bertelli, L., Chandrasekaran, S., Gibou, F., Manjunath, B.: On the length and area regularization for multiphase level set segmentation. Int. J. Comput. Vision 90, 267–282 (2010)

    Article  Google Scholar 

  4. Bertelli, L., Sumengen, B., Manjunath, B., Gibou, F.: A variational framework for multiregion pairwise-similarity-based image segmentation. IEEE Trans. Pattern Anal. Mach. Intell. 30(8), 1400–1414 (2008)

    Article  Google Scholar 

  5. Bita, I., Yang, J.K., Jung, Y.S., Ross, C.A., Thomas, E.L., Berggren, K.K.: Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates. Science 321(5891), 939–943 (2008)

    Article  Google Scholar 

  6. Bochkov, D., Bagaric, I., Ouaknin, G., Gibou, F.: Equilibrium of free surfaces and nanoparticles in self-consistent field theory of block copolymers. arXiv:2112.08660 (2021)

  7. Bochkov, D., Gibou, F.: Solving Poisson-type equations with Robin boundary conditions on piecewise smooth interfaces. J. Comput. Phys. 376, 1156–1198 (2019)

    Article  MathSciNet  Google Scholar 

  8. Bochkov, D., Gibou, F.: PDE-based multidimensional extrapolation of scalar fields over interfaces with kinks and high curvatures. SIAM J. Sci. Comput. 42(4), 2344–2359 (2020)

    Article  MathSciNet  Google Scholar 

  9. Bochkov, D., Gibou, F.: Solving elliptic interface problems with jump conditions on Cartesian grids. J. Comput. Phys. 407, 109269 (2020)

    Article  MathSciNet  Google Scholar 

  10. Brun, E., Guittet, A., Gibou, F.: A local level-set method using a hash table data structure. J. Comput. Phys. 231(6), 2528–2536 (2012)

    Article  MathSciNet  Google Scholar 

  11. Burchard, P., Cheng, L.-T., Merriman, B., Osher, S.: Motion of curves in three spatial dimensions using a level set approach. J. Comput. Phys. 170, 720–741 (2001)

    Article  MathSciNet  Google Scholar 

  12. Burger, M., Osher, S.: A survey on level set methods for inverse problems and optimal design. In: CAM Report (04-02) (in Press) (2004)

  13. Caflisch, R.E., Gyure, M.F., Merriman, B., Osher, S., Ratsch, C., Vvedensky, D.D., Zinck, J.J.: Island dynamics and the level set method for epitaxial growth. Appl. Math. Lett. 12, 13 (1999)

    Article  MathSciNet  Google Scholar 

  14. Chang, Y.-C., Hou, T., Merriman, B., Osher, S.: Eulerian capturing methods based on a level set formulation for incompressible fluid interfaces. J. Comput. Phys. 124, 449–464 (1996)

    Article  MathSciNet  Google Scholar 

  15. Chen, H., Min, C., Gibou, F.: A supra-convergent finite difference scheme for the Poisson and heat equations on irregular domains and non-graded adaptive Cartesian grids. J. Sci. Comput. 31, 19–60 (2007)

    Article  MathSciNet  Google Scholar 

  16. Chen, H., Min, C., Gibou, F.: A numerical scheme for the Stefan problem on adaptive Cartesian grids with supralinear convergence rate. J. Comput. Phys. 228(16), 5803–5818 (2009)

    Article  Google Scholar 

  17. Chen, S., Merriman, B., Osher, S., Smereka, P.: A simple level set method for solving Stefan problems. J. Comput. Phys. 135, 8–29 (1997)

    Article  MathSciNet  Google Scholar 

  18. Cheng, L.T., Liu, H., Osher, S.: Computational high-frequency wave propagation using the level set method, with applications to the semi-classical limit of Schrödinger equations. Commun. Math. Sci. 1, 593–621 (2003)

    Article  MathSciNet  Google Scholar 

  19. Chowdhury, R., Egan, R., Bochkov, D., Gibou, F.: Efficient calculation of fully resolved electrostatics around large biomolecules. J. Comput. Phys. 448, 110718 (2022)

    Article  MathSciNet  Google Scholar 

  20. Darling, S.: Directing the self-assembly of block copolymers. Prog. Polym. Sci. 32(10), 1152–1204 (2007)

    Article  Google Scholar 

  21. Detrixhe, M., Doubeck, M., Moehlis, J., Gibou, F.: A fast Eulerian approach for computation of global isochrons in high dimensions. SIAM J. Appl. Dyn. Syst. 15(3), 1501–1527 (2016)

    Article  MathSciNet  Google Scholar 

  22. Detrixhe, M., Gibou, F.: Hybrid massively parallel fast sweeping method for static Hamilton-Jacobi equations. J. Comput. Phys. 322, 199–223 (2016)

    Article  MathSciNet  Google Scholar 

  23. Detrixhe, M., Gibou, F., Min, C.: A parallel fast sweeping method for the Eikonal equation. J. Comput. Phys. 237, 46–55 (2013)

    Article  MathSciNet  Google Scholar 

  24. Du Chéné, A., Min, C., Gibou, F.: Second-order accurate computation of curvatures in a level set framework using novel high-order reinitialization schemes. J. Sci. Comput. 35, 114–131 (2008)

    Article  MathSciNet  Google Scholar 

  25. Egan, R., Gibou, F.: Geometric discretization of the multidimensional Dirac delta distribution-application to the Poisson equation with singular source terms. J. Comput. Phys. 346, 71–90 (2017)

    Article  MathSciNet  Google Scholar 

  26. Egan, R., Gibou, F.: Fast and scalable algorithms for constructing solvent-excluded surfaces of large biomolecules. J. Comput. Phys. 374, 91–120 (2018)

    Article  MathSciNet  Google Scholar 

  27. Egan, R., Gibou, F.: xGFM: recovering convergence of fluxes in the ghost fluid method. J. Comput. Phys. 409, 109351 (2020)

    Article  MathSciNet  Google Scholar 

  28. Enright, D., Nguyen, D., Gibou, F., Fedkiw, R.: Using the particle level set method and a second order accurate pressure boundary condition for free surface flows. In: Fluids Engineering Division Summer Meeting, 36975, 337–342 (2003)

  29. Fedkiw, R.P., Aslam, T., Merriman, B., Osher, S.: A non-oscillatory Eulerian approach to interfaces in multimaterial flows (the ghost fluid method). J. Comput. Phys. 152, 457–492 (1999)

    Article  MathSciNet  Google Scholar 

  30. Fedkiw, R.P., Sapiro, G., Shu, C.-W.: Shock capturing, level sets, and PDE based methods in computer vision and image processing: a review of Osher’s contributions. J. Comput. Phys. 185(2), 309–341 (2003)

    Article  MathSciNet  Google Scholar 

  31. Fredrickson, G.: The Equilibrium Theory of Inhomogeneous Polymers, vol. 134. Oxford University Press, Oxford (2006)

    Google Scholar 

  32. Gibou, F., Chen, L., Nguyen, D., Banerjee, S.: A level set based sharp interface method for the multiphase incompressible Navier-Stokes equations with phase change. J. Comput. Phys. 222(2), 536–555 (2007)

    Article  MathSciNet  Google Scholar 

  33. Gibou, F., Fedkiw, R., Caflisch, R., Osher, S.: A level set approach for the numerical simulation of dendritic growth. J. Sci. Comput. 19, 183–199 (2003)

    Article  MathSciNet  Google Scholar 

  34. Gibou, F., Fedkiw, R., Osher, S.: A review of level-set methods and some recent applications. J. Comput. Phys. 353, 82–109 (2018)

    Article  MathSciNet  Google Scholar 

  35. Gibou, F., Hyde, D., Fedkiw, R.: Sharp interface approaches and deep learning techniques for multiphase flows. J. Comput. Phys. 380, 442–463 (2019)

    Article  MathSciNet  Google Scholar 

  36. Gibou, F., Min, C.: Efficient symmetric positive definite second-order accurate monolithic solver for fluid/solid interactions. J. Comput. Phys. 231(8), 3246–3263 (2012)

    Article  MathSciNet  Google Scholar 

  37. Gibou, F., Min, C., Fedkiw, R.: High resolution sharp computational methods for elliptic and parabolic problems in complex geometries. J. Sci. Comput. 54, 369–413 (2013)

    Article  MathSciNet  Google Scholar 

  38. Gibou, F., Ratsch, C., Caflisch, R.: Capture numbers in rate equations and scaling laws for epitaxial growth. Phys. Rev. B 67(15), 155403 (2003)

    Article  Google Scholar 

  39. Gibou, F., Ratsch, C., Gyure, M., Chen, S., Caflisch, R.: Rate equations and capture numbers with implicit islands correlations. Phys. Rev. B 63(11), 115401 (2001)

    Article  Google Scholar 

  40. Guittet, A., Lepilliez, M., Tanguy, S., Gibou, F.: Solving elliptic problems with discontinuities on irregular domains-the Voronoi interface method. J. Comput. Phys. 298, 747–765 (2015)

    Article  MathSciNet  Google Scholar 

  41. Guittet, A., Poignard, C., Gibou, F.: A Voronoi interface approach to cell aggregate electropermeabilization. J. Comput. Phys. 332, 143–159 (2017)

    Article  MathSciNet  Google Scholar 

  42. Hannon, A.F., Ding, Y., Bai, W., Ross, C.A., Alexander-Katz, A.: Optimizing topographical templates for directed self-assembly of block copolymers via inverse design simulations. Nano Lett. 14(1), 318–325 (2014)

    Article  Google Scholar 

  43. Hannon, A.F., Gotrik, K.W., Ross, C.A., Alexander-Katz, A.: Inverse design of topographical templates for directed self-assembly of block copolymers. ACS Macro Lett. 2(3), 251–255 (2013)

    Article  Google Scholar 

  44. Helgadóttir, Á., Gibou, F.: A Poisson-Boltzmann solver on irregular domains with Neumann or Robin boundary conditions on non-graded adaptive grid. J. Comput. Phys. 230(10), 3830–3848 (2011)

    Article  MathSciNet  Google Scholar 

  45. Hou, T.Y., Li, Z., Osher, S., Zhao, H.: A hybrid method for moving interface problems with application to the Hele-Shaw flow. J. Comput. Phys. 134(2), 236–252 (1997)

    Article  MathSciNet  Google Scholar 

  46. Hu, H., Gopinadhan, M., Osuji, C.O.: Directed self-assembly of block copolymers: a tutorial review of strategies for enabling nanotechnology with soft matter. Soft Matter 10(22), 3867–3889 (2014)

    Article  Google Scholar 

  47. Jeong, S.-J., Kim, J.Y., Kim, B.H., Moon, H.-S., Kim, S.O.: Directed self-assembly of block copolymers for next generation nanolithography. Mater. Today 16(12), 468–476 (2013)

    Article  Google Scholar 

  48. Jin, S., Osher, S.: A level set method for computing multivalued solutions to quasi-linear hyperbolic equations and Hamilton-Jacobi equations. Commun. Math. Sci. 1(3), 575–591 (2003)

    Article  MathSciNet  Google Scholar 

  49. Langavant, C.C., Guittet, A., Theillard, M., Temprano-Coleto, F., Gibou, F.: Level-set simulations of soluble surfactant driven flows. J. Comput. Phys. 348, 271–297 (2017)

    Article  MathSciNet  Google Scholar 

  50. Larios-Cárdenas, L.Á., Gibou, F.: A deep learning approach for the computation of curvature in the level-set method. SIAM J. Sci. Comput. 43(3), 1754–1779 (2021)

    Article  MathSciNet  Google Scholar 

  51. Larios-Cárdenas, L.Á., Gibou, F.: Error-correcting neural networks for two-dimensional curvature computation in the level-set method. J. Sci. Comput. 93(1), 6 (2022)

    Article  MathSciNet  Google Scholar 

  52. Latypov, A.: Computational solution of inverse directed self-assembly problem. In: Alternative Lithographic Technologies V, vol. 8680, p. 86800. International Society for Optics and Photonics (2013)

  53. Lepilliez, M., Popescu, E.R., Gibou, F., Tanguy, S.: On two-phase flow solvers in irregular domains with contact line. J. Comput. Phys. 321, 1217–1251 (2016)

    Article  MathSciNet  Google Scholar 

  54. Liu, C.-C., Ramírez-Hernández, A., Han, E., Craig, G.S., Tada, Y., Yoshida, H., Kang, H., Ji, S., Gopalan, P., Pablo, J.J., Nealey, P.F.: Chemical patterns for directed self-assembly of lamellae-forming block copolymers with density multiplication of features. Macromolecules 46(4), 1415–1424 (2013)

    Article  Google Scholar 

  55. Losasso, F., Fedkiw, R., Osher, S.: Spatially adaptive techniques for level set methods and incompressible flow. Comput. Fluids 35, 995–1010 (2006)

    Article  MathSciNet  Google Scholar 

  56. Losasso, F., Gibou, F., Fedkiw, R.: Simulating water and smoke with an octree data structure. ACM Transactions on Graphics 23(3), 457–462 (2004)

    Article  Google Scholar 

  57. Losasso, F., Talton, J., Kwatra, N., Fedkiw, R.: Two-way coupled SPH and particle level set fluid simulation. IEEE Transactions on Visualization and Computer Graphics 14(4), 797–804 (2008)

    Article  Google Scholar 

  58. Merriman, B., Bence, J., Osher, S.: Motion of multiple junctions: a level set approach. J. Comput. Phys. 112, 334–363 (1994)

    Article  MathSciNet  Google Scholar 

  59. Min, C., Gibou, F.: A second order accurate level set method on non-graded adaptive Cartesian grids. J. Comput. Phys. 225(1), 300–321 (2007)

    Article  MathSciNet  Google Scholar 

  60. Min, C., Gibou, F.: Geometric integration over irregular domains with application to level-set methods. J. Comput. Phys. 226(2), 1432–1443 (2007)

    Article  MathSciNet  Google Scholar 

  61. Min, C., Gibou, F.: Robust second-order accurate discretizations of the multi-dimensional Heaviside and Dirac delta functions. J. Comput. Phys. 227(22), 9686–9695 (2008)

    Article  MathSciNet  Google Scholar 

  62. Min, C., Gibou, F., Ceniceros, H.D.: A supra-convergent finite difference scheme for the variable coefficient Poisson equation on non-graded grids. J. Comput. Phys. 218(1), 123–140 (2006)

    Article  MathSciNet  Google Scholar 

  63. Mirzadeh, M., Gibou, F.: A conservative discretization of the Poisson-Nernst-Planck equations on adaptive Cartesian grids. J. Comput. Phys. 274, 633–653 (2014)

    Article  MathSciNet  Google Scholar 

  64. Mirzadeh, M., Guittet, A., Burstedde, C., Gibou, F.: Parallel level-set methods on adaptive tree-based grids. J. Comput. Phys. 322, 345–364 (2016)

    Article  MathSciNet  Google Scholar 

  65. Mirzadeh, M., Theillard, M., Gibou, F.: A second-order discretization of the nonlinear Poisson-Boltzmann equation over irregular geometries using non-graded adaptive Cartesian grids. J. Comput. Phys. 230(5), 2125–2140 (2011)

    Article  MathSciNet  Google Scholar 

  66. Mistani, P., Guittet, A., Bochkov, D., Schneider, J., Margetis, D., Ratsch, C., Gibou, F.: The island dynamics model on parallel quadtree grids. J. Comput. Phys. 361, 150–166 (2018)

    Article  MathSciNet  Google Scholar 

  67. Mistani, P., Guittet, A., Poignard, C., Gibou, F.: A parallel Voronoi-based approach for mesoscale simulations of cell aggregate electropermeabilization. J. Comput. Phys. 380, 48–64 (2019)

    Article  MathSciNet  Google Scholar 

  68. Mulder, W., Osher, S., Sethian, J.: Computing interface motion in compressible gas dynamics. J. Comput. Phys. 100, 209–228 (1992)

    Article  MathSciNet  Google Scholar 

  69. Ng, Y.T., Chen, H., Min, C., Gibou, F.: Guidelines for Poisson solvers on irregular domains with Dirichlet boundary conditions using the ghost fluid method. J. Sci. Comput. 41, 300–320 (2009)

    Article  MathSciNet  Google Scholar 

  70. Ng, Y.T., Min, C., Gibou, F.: An efficient fluid-solid coupling algorithm for single-phase flows. J. Comput. Phys. 228(23), 8807–8829 (2009)

    Article  MathSciNet  Google Scholar 

  71. Nguyen, D., Gibou, F., Fedkiw, R.: A fully conservative ghost fluid method and stiff detonation waves. In: 12th Int. Detonation Symposium, San Diego, CA (2002)

  72. Ohta, T., Kawasaki, K.: Equilibrium morphology of block copolymer melts. Macromolecules 19(10), 2621–2632 (1986)

    Article  Google Scholar 

  73. Osher, S., Cheng, L.-T., Kang, M., Shim, H., Tsai, Y.-H.: Geometric optics in a phase-space-based level set and Eulerian framework. J. Comput. Phys. 179, 622–648 (2002)

    Article  MathSciNet  Google Scholar 

  74. Osher, S., Fedkiw, R.P.: Level set methods: an overview and some recent results. J. Comput. Phys. 169(2), 463–502 (2001)

    Article  MathSciNet  Google Scholar 

  75. Osher, S., Fedkiw, R.P.: Level Set Methods and Dynamic Implicit Surfaces, vol. 153. Springer, New York (2003)

    Google Scholar 

  76. Osher, S., Paragios, N.: Geometric Level Set Methods in Imaging, Vision, and Graphics. Springer, New York (2003)

    Book  Google Scholar 

  77. Osher, S., Santosa, F.: Level set methods for optimization problems involving geometry and constraints: frequencies of a two-density inhomogeneous drum. J. Comput. Phys. 171, 272–288 (2001)

    Article  MathSciNet  Google Scholar 

  78. Osher, S., Sethian, J.A.: F ronts propagating with curvature dependent speed: algorithms based on Hamilton-Jacobi formulations. J. Comput. Phys. 79(1), 12–49 (1988)

    Article  MathSciNet  Google Scholar 

  79. Ouaknin, G., Laachi, N., Delaney, K., Fredrickson, G., Gibou, F.: Shape optimization for DSA. In: Alternative Lithographic Technologies VIII, 9777, 97770. International Society for Optics and Photonics (2016)

  80. Ouaknin, G., Laachi, N., Delaney, K., Fredrickson, G.H., Gibou, F.: Self-consistent field theory simulations of polymers on arbitrary domains. J. Comput. Phys. 327, 168–185 (2016)

    Article  MathSciNet  Google Scholar 

  81. Ouaknin, G.Y., Laachi, N., Delaney, K., Fredrickson, G.H., Gibou, F.: Level-set strategy for inverse DSA-lithography. J. Comput. Phys. 375, 1159–1178 (2018)

    Article  MathSciNet  Google Scholar 

  82. Pakravan, S., Mistani, P.A., Aragon-Calvo, M.A., Gibou, F.: Solving inverse-PDE problems with physics-aware neural networks. J. Comput. Phys. 440, 110414 (2021)

    Article  MathSciNet  Google Scholar 

  83. Papac, J., Gibou, F., Ratsch, C.: Efficient symmetric discretization for the Poisson, heat and Stefan-type problems with Robin boundary conditions. J. Comput. Phys. 229(3), 875–889 (2010)

    Article  MathSciNet  Google Scholar 

  84. Papac, J., Helgadottir, A., Ratsch, C., Gibou, F.: A level set approach for diffusion and Stefan-type problems with Robin boundary conditions on quadtree/octree adaptive Cartesian grids. J. Comput. Phys. 233, 241–261 (2013)

    Article  MathSciNet  Google Scholar 

  85. Papac, J., Margetis, D., Gibou, F., Ratsch, C.: Island-dynamics model for mound formation: effect of a step-edge barrier. Phys. Rev. E 90(2), 022404 (2014)

    Article  Google Scholar 

  86. Peng, D., Merriman, B., Osher, S., Zhao, H., Kang, M.: A PDE-based fast local level set method. J. Comput. Phys. 155, 410–438 (1999)

    Article  MathSciNet  Google Scholar 

  87. Petersen, M., Ratsch, C., Caflisch, R.E., Zangwill, A.: A level set approach to reversible epitaxial growth. Phys. Rev. E 64, 061602 (2001)

    Article  Google Scholar 

  88. Ratsch, C., Gyure, M., Caflisch, R., Gibou, F., Petersen, M., Kang, M., Garcia, J., Vvedensky, D.: Level-set method for island dynamics in epitaxial growth. Phys. Rev. B 65(19), 195403 (2002)

    Article  Google Scholar 

  89. Ruiz, R., Kang, H., Detcheverry, F.A., Dobisz, E., Kercher, D.S., Albrecht, T.R., Pablo, J.J., Nealey, P.F.: Density multiplication and improved lithography by directed block copolymer assembly. Science 321(5891), 936–939 (2008)

    Article  Google Scholar 

  90. Rycroft, C.H., Gibou, F.: Simulations of a stretching bar using a plasticity model from the shear transformation zone theory. J. Comput. Phys. 231(5), 2155–2179 (2012)

    Article  MathSciNet  Google Scholar 

  91. Sethian, J.A.: Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision, and Materials Science, vol. 3. Cambridge University Press, Cambridge (1999)

    Google Scholar 

  92. Shim, S., Shin, Y.: Mask optimization for directed self-assembly lithography: inverse DSA and inverse lithography. In: 2016 21st Asia and South Pacific Design Automation Conference (ASP-DAC), pp. 83–88. IEEE (2016)

  93. Smereka, P.: Semi-implicit level set methods for curvature and surface diffusion motion. J. Sci. Comput. 19, 439–456 (2003)

    Article  MathSciNet  Google Scholar 

  94. Sussman, M., Fatemi, E., Smereka, P., Osher, S.: An improved level set method for incompressible two-phase flows. Comput. Fluids 27, 663–680 (1998)

    Article  Google Scholar 

  95. Sussman, M., Smereka, P., Osher, S.: A level set approach for computing solutions to incompressible two-phase flow. J. Comput. Phys. 114, 146–159 (1994)

    Article  Google Scholar 

  96. Theillard, M., Djodom, L.F., Vié, J.-L., Gibou, F.: A second-order sharp numerical method for solving the linear elasticity equations on irregular domains and adaptive grids-application to shape optimization. J. Comput. Phys. 233, 430–448 (2013)

    Article  MathSciNet  Google Scholar 

  97. Theillard, M., Gibou, F., Pollock, T.: A sharp computational method for the simulation of the solidification of binary alloys. J. Sci. Comput. 63, 330–354 (2015)

    Article  MathSciNet  Google Scholar 

  98. Theillard, M., Gibou, F., Saintillan, D.: Sharp numerical simulation of incompressible two-phase flows. J. Comput. Phys. 391, 91–118 (2019)

    Article  MathSciNet  Google Scholar 

  99. Tiron, R., Gharbi, A., Argoud, M., Chevalier, X., Belledent, J., Barros, P.P., Servin, I., Navarro, C., Cunge, G., Barnola, S., Pain, L., Asai, M., Pieczulewski, C.: The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication. In: Alternative Lithographic Technologies V, vol. 8680, p. 868012. International Society for Optics and Photonics (2013)

  100. Tsai, Y.-H., Osher, S.: Level set methods and their applications in image science. Commun. Math. Sci. 1(4), 623–656 (2003)

  101. Zhao, H.-K., Chan, T., Merriman, B., Osher, S.: A variational level set approach to multiphase motion. J. Comput. Phys. 127, 179–195 (1996)

    Article  MathSciNet  Google Scholar 

  102. Zhao, H.-K., Osher, S., Fedkiw, R.: Fast surface reconstruction using the level set method. In: 1st IEEE Wrkshp. on Variational and Level Set Meth., 8th Int. Conf. on Comput. Vis., pp. 194–202. IEEE (2001)

Download references

Acknowledgements

The authors would like to acknowledge Gaddiel Ouaknin for useful discussions. This research was supported by the NSF DMS 1620471.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Daniil Bochkov.

Ethics declarations

Conflict of Interest

The authors declare no conflict of interest.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Bochkov, D., Gibou, F. A Non-parametric Gradient-Based Shape Optimization Approach for Solving Inverse Problems in Directed Self-Assembly of Block Copolymers. Commun. Appl. Math. Comput. (2024). https://doi.org/10.1007/s42967-024-00394-x

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s42967-024-00394-x

Keywords

Mathematics Subject Classification

Navigation