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Modeling, Simulation, and Optimization of Piezoelectrically Actuated Dual-Axis MEMS Accelerometer for Seismic Sensing

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Abstract

Purpose

The purpose of the designed MEMS dual axis accelerometer is to act as a seismic sensor by measuring low-level vibration at low frequencies, usually including those below 1 Hz. Piezoelectric materials have demonstrated broad applicability in numerous devices and electronic applications. Since piezoelectric energy harvesting devices create their highest power at the resonance frequency, there is a strong relationship between frequency and power density, where ω is the fundamental vibration mode frequency, the potential output power is proportional to 1/ω.

Methods

A dual-axis MEMS piezoelectric accelerometer for low-frequency seismic sensing was modelled and simulated with different suspension systems. For a bandwidth range of 1 KHz, COMSOL Multiphysics has been used to simulate the accelerometer supported by a U beam, Parallel beam, folded beam, and Swastik structures. The dual detection of acceleration in the X–Y direction and the ability to produce voltage was detected in all four variations of MEMS accelerometers.

Results

The dual detection of acceleration in the X–Y direction and the ability to produce voltage was detected in all four variations of MEMS accelerometers. Based on the investigation, it has been found that the Swastik design produces the highest stress overall, with a value of 0.4 × 105 N/m2 and has a maximum sensitivity of 0.8 × 10-3 Volts/g, making it more suited for seismic sensing applications.

Conclusion

The proposed dual-axis MEMS piezoelectric accelerometer with the Swastik suspension system can be used as a seismic sensor to detect low-frequency seismic signals, particularly P-waves. The findings of this paper can be applied in the development of new and improved MEMS accelerometers for various applications, such as vibration sensing, structural health monitoring, and seismic sensing.

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Acknowledgements

The authors would like to thank the management of Nitte Meenakshi Institute of Technology, Bengaluru for setting up the Center for Nanomaterials and MEMS where this work was carried out.

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Authors and Affiliations

  1. Center for Nanomaterials and MEMS, Nitte Meenakshi Institute of Technology, Bangalore, India

    G. Nithya, A. Sthuthi, Niroop Chandrashekar & K. Naveen Kumar

  2. Department of Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, India

    G. Nithya, A. Sthuthi & Niroop Chandrashekar

  3. Department of Physics, Nitte Meenakshi Institute of Technology, Bangalore, India

    K. Naveen Kumar

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  1. G. Nithya
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  2. A. Sthuthi
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Nithya, G., Sthuthi, A., Chandrashekar, N. et al. Modeling, Simulation, and Optimization of Piezoelectrically Actuated Dual-Axis MEMS Accelerometer for Seismic Sensing. J. Vib. Eng. Technol. 12, 5383–5395 (2024). https://doi.org/10.1007/s42417-023-01169-z

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  • DOI: https://doi.org/10.1007/s42417-023-01169-z

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