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A Two-Square Shaped Phononic Crystal Strip for Anchor Quality Factor Enhancement in a Length Extensional Mode TPoS Resonator

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Abstract

Background

A microelectromechanical systems (MEMS) resonator with a high quality factor can improve the phase noise of the oscillators as well as the insertion loss of the filters based on the MEMS resonators. The anchor loss is one of the most significant loss sources that contributes to the degradation of the quality factor.

Purpose

This paper proposes a two-square shaped phononic crystal (PnC) strip based support tether configuration to enhance the quality factor (Q) of a length extensional mode thin-film aluminium nitride-on-silicon (TPoS) resonator in terms of the anchor quality factor (Qanc).

Methods

This resonator operates at 127.23 MHz. The band gap of the proposed PnC which covers the resonant frequency of the resonator is 30.15 MHz. Firstly, the Qanc of the resonator with the proposed PnC is investigated, corresponding with a different PnC unit cell number to determine the change of the Qanc as well as the elimination of anchor loss. Secondly, the effectiveness of the proposed PnC strip in boosting the Qanc of the resonator is also compared to its two conventional counterparts. Finally, the in uence of the geometrical parameters of the proposed PnC trip on the characteristics of band gaps is analyzed. The finite element (FE) simulations are performed in COMSOL Multiphysics (COMSOL) and their post processing results are analyzed in MATLAB.

Results

The simulation results show that the \(Q_\mathrm{{anc}}\) of the resonator which is supported by the proposed PnC strip tethers is 12242, and 45627 for one and two unit cell cases, respectively. These values with one unit cell are 98.67% and 99.67% higher than those with conventional PnC tethers. The anchor loss is completely suppressed when the unit cell number of the proposed PnC is higher than two cells.

Conclusion

The \(Q_\mathrm{{anc}}\) improvement with the proposed PnC strip is superior to two conventional PnC strips.

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Authors and Affiliations

  1. Industrial University of Ho Chi Minh City, Ho Chi Minh City, Vietnam

    Thi Dep Ha

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Appendix

Appendix

The mesh structures of a unit cell of the proposed PnC strip and the resonator are provided in Fig. 7. The parameters of the mesh structures are given in Table 3.

Table 3 Parameters of the mesh structures
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Fig. 7
figure 7

Mesh structure of a a unit cell of the proposed PnC strip, b a symmetrical half of the resonator with the proposed PnC tether and PML

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Ha, T.D. A Two-Square Shaped Phononic Crystal Strip for Anchor Quality Factor Enhancement in a Length Extensional Mode TPoS Resonator. J. Vib. Eng. Technol. 10, 1073–1080 (2022). https://doi.org/10.1007/s42417-021-00429-0

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