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Design and Analysis of Various Characteristics of a MEMS-Based PIB/CNT/LiNbO3 Multilayered SAW Sensor for CO2 Gas Detection

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Abstract

This paper presents the design and analysis of a surface acoustic wave (SAW) sensor with a multilayer nanocomposite to detect carbon dioxide (CO2) gas. SAW resonator impacts the detection and identification of hazardous gases that exist in the environment in an uncontrolled manner. These devices have the operational capability to work in a very extreme elevated temperature, pressure, and inert noxious atmosphere. The proposed work is intended to provide a two-dimensional model of a surface acoustic wave device/sensor and the most prominent solid material, carbon nanotube (CNT), which plays a vital role in the adsorption of volatile organic compounds. However, another miniature sensor has been designed with a potential material, an organic polymer, i.e., poly-isobutylene (PIB). Both the sensor model responses were examined for CO2 gas at room temperature. In this work, we have designed two different resonator structures with the help of COMSOL Multiphysics. The proposed, designed models were patterned with interdigitated transducer electrodes made of aluminum material coated explicitly on top of the structure were used to analyze gas sensing behavior for CO2 gaseous elements. Here the proposed geometry provides resonance of 9.1524 MHz and anti-resonance of 9.2455 MHz for monolayer structure and resonance of 8.6447 MHz, and anti-resonance of 8.5201 MHz for multilayer structure. Comparatively, the second sensor PIB/CNT/LiNbO3 heterostructure pattern was also designed to be the best choice for the accurate and reliable measurement of the concentration of various gaseous elements based on a few parameters are discussed further.

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Acknowledgements

We thank to Gandhi Institute of Engineering and Technology University, Gunupur, India for extending supports to carry out the research work. We also thank to National Institute of Technology Jamshedpur, Jharkhand, India for providing the simulation facilities to successfully carry out the research work.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Gandhi Institute of Engineering and Technology University, Gunupur, India

    Ashish Tiwary & Shasanka Sekhar Rout

  2. Department of Electronics and Communication Engineering, National Institute of Technology Jamshedpur, Jamshedpur, Jharkhand, India

    Basudeba Behera

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  1. Ashish Tiwary
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Correspondence to Basudeba Behera.

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Tiwary, A., Rout, S.S. & Behera, B. Design and Analysis of Various Characteristics of a MEMS-Based PIB/CNT/LiNbO3 Multilayered SAW Sensor for CO2 Gas Detection. Trans. Electr. Electron. Mater. 23, 609–617 (2022). https://doi.org/10.1007/s42341-022-00392-x

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