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Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

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A Correction to this article was published on 23 November 2022

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Abstract

This paper presents a compact XYZ micro-stage driven by an impact driving mechanism. A moving body is translationally actuated along the X-, Y-, and Z-axes in millimeter-scale range and with nanometer-scale resolution. Cr–N thin-film strain sensors are integrated into the micro-stage for closed-loop positioning. Closed-loop control is also carried out. The motion errors in six degrees of freedom are also investigated for this micro-stage. It is clarified by analysis of finite element method that rotational motion errors around the driving axis are caused by torques due to tensions from the elastic hinges of micro-stage. The mechanical structure of XYZ micro-stage to cancel out the torque generated is proposed and the second prototype is fabricated. Although the rotational motion error is successfully suppressed in the second prototype, a rotational motion error of more than 0.1° remains due to remaining torque and assembly error of the elastic hinges. Then, in order to reduce the rotational motion error, the prototype is designed in which the location of elastic hinges is single-layered. By designing a mechanical structure in which torque is suppressed, all rotational motion errors are successfully reduced to less than 0.05° in the prototype with single-layer hinges.

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Acknowledgements

This work was supported by JSPS KAKENHI Grant Numbers JP 15H05759 and JP 20H00211.

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Authors and Affiliations

  1. Department of Finemechanics, Graduate School of Engineering, Tohoku University, Miyagi, Sendai, 980-8579, Japan

    Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu & Wei Gao

  2. Research Institute for Electromagnetic Materials, 9-5-1 Narita, Miyagi, Tomiya, 981-3341, Japan

    Eiji Niwa & Yoshihiro Sasaki

Authors
  1. Hiraku Matsukuma
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  2. Keisuke Adachi
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  3. Takuma Sugawara
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  4. Yuki Shimizu
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  5. Wei Gao
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  6. Eiji Niwa
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  7. Yoshihiro Sasaki
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Correspondence to Hiraku Matsukuma.

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Competing Interests

Wei Gao is an executive editor for "Nanomanfucturing and Metrology" and was not involved in the editorial review, or the decision to publish this article. All authors declare that there are no competing interests.

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The original online version of this article was revised: The declaration text was missing

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Matsukuma, H., Adachi, K., Sugawara, T. et al. Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors. Nanomanuf Metrol 4, 53–66 (2021). https://doi.org/10.1007/s41871-020-00091-2

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  • DOI: https://doi.org/10.1007/s41871-020-00091-2

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